From skoh at snf.stanford.edu Tue Aug 12 17:01:04 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 12 Aug 2008 17:01:04 -0700 Subject: Problem lampoly SNF 2008-08-12 17:01:04: High Reflective Power Message-ID: Running Recipe 77 on dummy wafers. For Top RF power of 250W, I was getting reflective power of more than 200W. The bias was also very different compared to the values obtained previously. From rik at snf.stanford.edu Wed Aug 13 14:20:12 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 13 Aug 2008 14:20:12 -0700 Subject: Shutdown lampoly SNF 2008-08-13 14:20:11: No etch taking place Message-ID: Tried Recipe 1 for 7 mins on Si. No etching took place. From eenriquez at snf.stanford.edu Wed Aug 13 18:40:32 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Aug 2008 18:40:32 -0700 Subject: Comment lampoly SNF 2008-08-13 18:40:31: Update Message-ID: Top electrode RF reflected power is too high. Forward power = 245 W, reflected power = 239 W. System did not alarm because the fault tolerance was set at 99%. Need to troubleshoot further. From cbaxter at snf.stanford.edu Sat Aug 16 08:31:25 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 16 Aug 2008 08:31:25 -0700 Subject: Comment lampoly SNF 2008-08-16 08:31:24: Arcing Message-ID: One of the variable cap on the upper matching netwrok shorted and arc, checking system manual for part number for the variable cap, most likely will need to call lam tech support. From emyers at snf.stanford.edu Tue Aug 19 03:27:22 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 19 Aug 2008 03:27:22 -0700 Subject: Shutdown lampoly SNF 2008-08-19 03:27:22: Cl and HBr are off Message-ID: Chlorine and HBR gas cabinet is off following toxic gas alarm. Alarm showed Cl in the P5000 exhaust monitor. Since the etch tools have not recovered from the power outage, I did not turn on the gases. From emyers at snf.stanford.edu Tue Aug 19 10:51:45 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 19 Aug 2008 10:51:45 -0700 Subject: Shutdown lampoly SNF 2008-08-19 03:27:22: Cl and HBr are off Message-ID: Cl and HBr gas cabinets were reset at 9am. From eenriquez at snf.stanford.edu Tue Aug 19 15:29:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Aug 2008 15:29:41 -0700 Subject: Comment lampoly SNF 2008-08-19 15:29:41: Update Message-ID: Ordered new tuning capacitor. Part should be here by Thursday From cbaxter at snf.stanford.edu Thu Aug 21 00:13:28 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 21 Aug 2008 00:13:28 -0700 Subject: Comment lampoly SNF 2008-08-21 00:13:28: HIgh reflective Message-ID: Installed new variable cap and tested, getting all reverse power. I ohmed out upper coil (good) and verified there is good connection from rf strap to banana plug. Verified rf cable(good), put generator into dummy load (good). still troubleshooting... From eenriquez at snf.stanford.edu Thu Aug 21 06:59:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Aug 2008 06:59:33 -0700 Subject: Comment lampoly SNF 2008-08-19 15:29:41: Update Message-ID: Archived From shott at snf.stanford.edu Wed Aug 27 19:45:03 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 27 Aug 2008 19:45:03 -0700 Subject: Shutdown lampoly SNF 2008-08-13 14:20:11: No etch taking place Message-ID: Cesar replaced the tuning cap with a new Jennings 3-30 pf variable cap. This cap takes 18 turns to tune from 3-30 pf .... but the Lampoly can only mechanically tune over about 6 turns. So, we need to "preset" at about the proper range so that it can properly lock in. This was accomplished with the help of Jim McVittie and his magical HP 4815A RF Vector Impedance Voltmeter. Many would call it a museum piece .... but it saved our bacon. Basically, we were able to use it to find the tune point (zero phase angle and maximum impedance). This is very sensitive +/- 1/8 turn offsets the tuning by about +/- 45 degrees. Once we found the center point, Jim recommended that we tune just to one side. So, we arbitrarily pre-tuned to +30 degrees. Tuning seem to be behaving well. Cesar has tried a variety of recipes and, thus far at least, all of them seem to be tuning properly. Happy etching, John From shott at snf.stanford.edu Wed Aug 27 19:45:41 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 27 Aug 2008 19:45:41 -0700 Subject: Problem lampoly SNF 2008-08-12 17:01:04: High Reflective Power Message-ID: Cesar replaced the tuning cap with a new Jennings 3-30 pf variable cap. This cap takes 18 turns to tune from 3-30 pf .... but the Lampoly can only mechanically tune over about 6 turns. So, we need to "preset" at about the proper range so that it can properly lock in. This was accomplished with the help of Jim McVittie and his magical HP 4815A RF Vector Impedance Voltmeter. Many would call it a museum piece .... but it saved our bacon. Basically, we were able to use it to find the tune point (zero phase angle and maximum impedance). This is very sensitive ? 1/8 turn offsets the tuning by about ? 45 degrees. Once we found the center point, Jim recommended that we tune just to one side. So, we arbitrarily pre-tuned to +30 degrees. Tuning seem to be behaving well. Cesar has tried a variety of recipes and, thus far at least, all of them seem to be tuning properly. Happy etching, John From shott at snf.stanford.edu Wed Aug 27 19:45:49 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 27 Aug 2008 19:45:49 -0700 Subject: Comment lampoly SNF 2008-08-16 08:31:24: Arcing Message-ID: Cesar replaced the tuning cap with a new Jennings 3-30 pf variable cap. This cap takes 18 turns to tune from 3-30 pf .... but the Lampoly can only mechanically tune over about 6 turns. So, we need to "preset" at about the proper range so that it can properly lock in. This was accomplished with the help of Jim McVittie and his magical HP 4815A RF Vector Impedance Voltmeter. Many would call it a museum piece .... but it saved our bacon. Basically, we were able to use it to find the tune point (zero phase angle and maximum impedance). This is very sensitive ? 1/8 turn offsets the tuning by about ? 45 degrees. Once we found the center point, Jim recommended that we tune just to one side. So, we arbitrarily pre-tuned to +30 degrees. Tuning seem to be behaving well. Cesar has tried a variety of recipes and, thus far at least, all of them seem to be tuning properly. Happy etching, John From shott at snf.stanford.edu Wed Aug 27 19:45:58 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 27 Aug 2008 19:45:58 -0700 Subject: Comment lampoly SNF 2008-08-13 18:40:31: Update Message-ID: Cesar replaced the tuning cap with a new Jennings 3-30 pf variable cap. This cap takes 18 turns to tune from 3-30 pf .... but the Lampoly can only mechanically tune over about 6 turns. So, we need to "preset" at about the proper range so that it can properly lock in. This was accomplished with the help of Jim McVittie and his magical HP 4815A RF Vector Impedance Voltmeter. Many would call it a museum piece .... but it saved our bacon. Basically, we were able to use it to find the tune point (zero phase angle and maximum impedance). This is very sensitive ? 1/8 turn offsets the tuning by about ? 45 degrees. Once we found the center point, Jim recommended that we tune just to one side. So, we arbitrarily pre-tuned to +30 degrees. Tuning seem to be behaving well. Cesar has tried a variety of recipes and, thus far at least, all of them seem to be tuning properly. Happy etching, John From shott at snf.stanford.edu Wed Aug 27 19:46:05 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 27 Aug 2008 19:46:05 -0700 Subject: Comment lampoly SNF 2008-08-21 00:13:28: HIgh reflective Message-ID: Cesar replaced the tuning cap with a new Jennings 3-30 pf variable cap. This cap takes 18 turns to tune from 3-30 pf .... but the Lampoly can only mechanically tune over about 6 turns. So, we need to "preset" at about the proper range so that it can properly lock in. This was accomplished with the help of Jim McVittie and his magical HP 4815A RF Vector Impedance Voltmeter. Many would call it a museum piece .... but it saved our bacon. Basically, we were able to use it to find the tune point (zero phase angle and maximum impedance). This is very sensitive ? 1/8 turn offsets the tuning by about ? 45 degrees. Once we found the center point, Jim recommended that we tune just to one side. So, we arbitrarily pre-tuned to +30 degrees. Tuning seem to be behaving well. Cesar has tried a variety of recipes and, thus far at least, all of them seem to be tuning properly. Happy etching, John From ofidaner at snf.stanford.edu Sun Aug 31 13:06:18 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Sun, 31 Aug 2008 13:06:18 -0700 Subject: Problem lampoly SNF 2008-08-31 13:06:17: water chiller failure Message-ID: Cannot run the system.