Problem lampoly SNF 2008-08-12 17:01:04: High Reflective Power

skoh at snf.stanford.edu skoh at snf.stanford.edu
Tue Aug 12 17:01:04 PDT 2008


Running Recipe 77 on dummy wafers.  For Top RF power of 250W, I was getting reflective power of more than 200W.  The bias was also very different compared to the values obtained previously.




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