Problem lampoly SNF 2008-08-12 17:01:04: High Reflective Power
skoh at snf.stanford.edu
skoh at snf.stanford.edu
Tue Aug 12 17:01:04 PDT 2008
Running Recipe 77 on dummy wafers. For Top RF power of 250W, I was getting reflective power of more than 200W. The bias was also very different compared to the values obtained previously.
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