Shutdown lampoly SNF 2008-08-19 03:27:22: Cl and HBr are off

emyers at snf.stanford.edu emyers at snf.stanford.edu
Tue Aug 19 03:27:22 PDT 2008


Chlorine and HBR gas cabinet is off following toxic gas alarm.  Alarm showed Cl in the P5000 exhaust monitor.  Since the etch tools have not recovered from the power outage, I did not turn on the gases.




More information about the lampoly-pcs mailing list