From cbaxter at snf.stanford.edu  Sat Dec  6 10:44:51 2008
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sat, 6 Dec 2008 10:44:51 -0800
Subject: Comment lampoly SNF 2008-12-06 10:44:51: Wafer transfer
Message-ID: <mailman.1031.1356282347.4111.lampoly-pcs@snf.stanford.edu>

I verified wafer pick up from load to entrance load lock arm
(good).  Checked wafer handoff from entrance arm to 
chamber chuck placement and is also look good. 



From mtang at snf.stanford.edu  Fri Dec 12 14:48:16 2008
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Fri, 12 Dec 2008 14:48:16 -0800
Subject: Problem lampoly SNF 2008-12-12 14:48:15: Error 209
Message-ID: <mailman.1032.1356282347.4111.lampoly-pcs@snf.stanford.edu>

"Recipe holding in Stability step.  He clamp pressure exceeding soft tolerance."  This occured for the first wafer but was OK thereafter.  He flow was bouncy.  



From eenriquez at snf.stanford.edu  Mon Dec 15 10:03:20 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 15 Dec 2008 10:03:20 -0800
Subject: Shutdown lampoly SNF 2008-12-15 10:03:19: Turbo pump
Message-ID: <mailman.1033.1356282347.4111.lampoly-pcs@snf.stanford.edu>

Borrowing the turbo pump.  Pump will be used on STSetch