February 2008 Archives by date

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Starting: Fri Feb 1 11:50:25 PST 2008
Ending: Fri Feb 29 17:03:46 PST 2008
Messages: 45

• Shutdown lampoly SNF 2008-01-24 08:24:33: Lower Water Pump   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-01-30 18:46:44: Update   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-01 11:51:22: Electrode temp out of tolerance   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-01 11:51:22: Electrode temp out of tolerance   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-01-31 19:43:33: Lam etcher blew a high pressure hose   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-01-23 19:24:28: error 184   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-01-22 13:43:26: HBr looks good   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-01-21 13:03:56: HBr Shu tDown   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-01-21 11:12:15: HBr problem again   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-01-19 15:48:15: Problem with HBr   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2007-12-17 11:06:53: Completed wet clean, chamber is purging.   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-02-01 14:34:49: Needs a process qualification   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-02-04 17:43:42: HBr flow fluctuates   filip at snf.stanford.edu
• Problem lampoly SNF 2008-02-05 07:38:45: system processing is halted.   kimsora at snf.stanford.edu
• Comment lampoly SNF 2008-02-05 10:49:24: Liquid HBr in the gas line   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-02-05 14:39:17: Needs new HBr MFC   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-08 15:53:25: No HBr   mtang at snf.stanford.edu
• Comment lampoly SNF 2008-02-12 14:14:12: Installed HBr MFC   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-02-04 17:43:42: HBr flow fluctuates   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-02-05 07:38:45: system processing is halted.   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-02-05 10:49:24: Liquid HBr in the gas line   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-02-05 14:39:17: Needs new HBr MFC   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-08 15:53:25: No HBr   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-02-12 14:14:12: Installed HBr MFC   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-02-01 14:34:49: Needs a process qualification   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-02-13 20:56:47: Etch rate test not yet done   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-15 15:24:01: Wafer stuck inside!   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-15 15:24:01: Wafer stuck inside!   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-02-19 16:41:03: zero bias for main wafers   iwjung at snf.stanford.edu
• Problem lampoly SNF 2008-02-19 17:18:49: Etch rate looks odd.   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-20 14:34:19: Wafer stuck !!!   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-20 14:34:19: Wafer stuck !!!   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-21 16:02:12: Possible wafer lost in chamber   gsosa at snf.stanford.edu
• Comment lampoly SNF 2008-02-22 16:16:01: Still Down!!   gsosa at snf.stanford.edu
• Comment lampoly SNF 2008-02-25 14:33:16: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-02-22 16:16:01: Still Down!!   eenriquez at snf.stanford.edu
• Comment p5000etch SNF 2008-02-26 14:12:27: Ch.A generator installed   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-21 16:02:12: Possible wafer lost in chamber   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-26 14:17:58: Defective vacuum pump   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-02-27 19:16:56: Update   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-26 14:17:58: Defective vacuum pump   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-02-27 19:16:56: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-02-25 14:33:16: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-02-29 14:29:07: Update   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-02-29 17:03:46: Turbo and chamber pressure errors   gsosa at snf.stanford.edu

Last message date: Fri Feb 29 17:03:46 PST 2008
Archived on: Sun Dec 23 09:06:08 PST 2012

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