From maryamzm at snf.stanford.edu Mon Jan 14 10:52:30 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Mon, 14 Jan 2008 10:52:30 -0800 Subject: Problem lampoly SNF 2008-01-14 10:52:27: Message-ID: There is an alarm on lampoly: water chiller failed. I'm not sure if I'm supposed to shut it down. From cbaxter at snf.stanford.edu Mon Jan 14 11:42:27 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 14 Jan 2008 11:42:27 -0800 Subject: Problem lampoly SNF 2008-01-14 10:52:27: Message-ID: Reset chiller and refilled with di water. From maryamzm at snf.stanford.edu Mon Jan 14 18:28:04 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Mon, 14 Jan 2008 18:28:04 -0800 Subject: Problem lampoly SNF 2008-01-14 18:28:03: Message-ID: Alarm # 57: Shuttle failed request to move to home position. also gave an alarm on edge finger but that one cleared up but the home position error keeps coming back. From cbaxter at snf.stanford.edu Tue Jan 15 08:07:13 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Jan 2008 08:07:13 -0800 Subject: Problem lampoly SNF 2008-01-14 18:28:03: Message-ID: initialized load arm.. From cbaxter at snf.stanford.edu Tue Jan 15 08:07:21 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Jan 2008 08:07:21 -0800 Subject: Problem lampoly SNF 2008-01-14 18:28:03: Message-ID: From maryamzm at snf.stanford.edu Wed Jan 16 18:49:49 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Wed, 16 Jan 2008 18:49:49 -0800 Subject: Shutdown lampoly SNF 2008-01-16 18:49:49: wafer stuck inside the chamber Message-ID: There's a wafer stuck inside the chamber and also inside loadlock chamber...the arm dropped the wafer inside the loadlock, not sure how. Also the status page doesn't show that there are any wafers inside either chamber....I think it failed to sense the first wafer and tried to load the second one in...All wafers are dummies, I was trying to season the chamber. From cbaxter at snf.stanford.edu Thu Jan 17 10:25:08 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 17 Jan 2008 10:25:08 -0800 Subject: Shutdown lampoly SNF 2008-01-16 18:49:49: wafer stuck inside the chamber Message-ID: Recovered wafer from main and load lock chamber, cycled wafer using recipe w/out problem. From tura at snf.stanford.edu Thu Jan 17 14:33:29 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 17 Jan 2008 14:33:29 -0800 Subject: Shutdown lampoly SNF 2008-01-17 14:33:28: turbo error, wafer missing Message-ID: There was a turbo error when the wafer was inside the process chamber, after that the wafer didn't come out. From cbaxter at snf.stanford.edu Thu Jan 17 15:14:12 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 17 Jan 2008 15:14:12 -0800 Subject: Shutdown lampoly SNF 2008-01-17 14:33:28: turbo error, wafer missing Message-ID: Reset turbo aand ramped back to speed and unload wafer. From tura at snf.stanford.edu Sat Jan 19 15:48:17 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Sat, 19 Jan 2008 15:48:17 -0800 Subject: Problem lampoly SNF 2008-01-19 15:48:15: Problem with HBr Message-ID: I tried use recipe #25 (HBr=150), but HBr flow started going down soon after and I got error "Gas #2 out of soft limits." From tura at snf.stanford.edu Mon Jan 21 11:12:17 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Mon, 21 Jan 2008 11:12:17 -0800 Subject: Problem lampoly SNF 2008-01-21 11:12:15: HBr problem again Message-ID: I reported the problem before but machine status is still green(coral problem?). HBr flow rate is going down constantly, cannot match the setpoint. From emyers at snf.stanford.edu Mon Jan 21 13:03:57 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 21 Jan 2008 13:03:57 -0800 Subject: Problem lampoly SNF 2008-01-21 13:03:56: HBr Shu tDown Message-ID: Found HBr cabinet shut down. When I tried to reset the cabinet it again shut down. Will look in to the problem on Tuesday. From tura at snf.stanford.edu Tue Jan 22 13:43:26 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 22 Jan 2008 13:43:26 -0800 Subject: Comment lampoly SNF 2008-01-22 13:43:26: HBr looks good Message-ID: From chingmei at snf.stanford.edu Wed Jan 23 19:24:28 2008 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Wed, 23 Jan 2008 19:24:28 -0800 Subject: Problem lampoly SNF 2008-01-23 19:24:28: error 184 Message-ID: The wafer chiller has failed From cbaxter at snf.stanford.edu Thu Jan 24 08:24:33 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 24 Jan 2008 08:24:33 -0800 Subject: Shutdown lampoly SNF 2008-01-24 08:24:33: Lower Water Pump Message-ID: The lower heat exchanger pump is seized, need to order a replacement water pump. From eenriquez at snf.stanford.edu Tue Jan 29 14:39:16 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Jan 2008 14:39:16 -0800 Subject: Comment lampoly SNF 2008-01-29 14:39:16: Pump update Message-ID: Found a replacement water pump. Will replace pump tomorrow. From eenriquez at snf.stanford.edu Wed Jan 30 18:46:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 Jan 2008 18:46:06 -0800 Subject: Comment lampoly SNF 2008-01-29 14:39:16: Pump update Message-ID: Mike D. help install a new chiller. Unable to turn on the new chiller because of a "Fail" alarm on the chiller. If still unable to clear, we will remove the pump and install it on the old chiller. From eenriquez at snf.stanford.edu Wed Jan 30 18:46:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 Jan 2008 18:46:45 -0800 Subject: Comment lampoly SNF 2008-01-30 18:46:44: Update Message-ID: Mike D. help install a new chiller. Unable to turn on the new chiller because of a "Fail" alarm on the chiller. If still unable to clear, we will remove the pump and install it on the old chiller. From king at snf.stanford.edu Thu Jan 31 19:43:34 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 31 Jan 2008 19:43:34 -0800 Subject: Shutdown lampoly SNF 2008-01-31 19:43:33: Lam etcher blew a high pressure hose Message-ID: Either N2 or CDA, on the back, topside of the machine. I duct taped the hole in the line as best as possible in case it affected other equipment but it's still leaking.