Shutdown lampoly SNF 2008-01-16 18:49:49: wafer stuck inside the chamber

maryamzm at maryamzm at
Wed Jan 16 18:49:49 PST 2008

There's a wafer stuck inside the chamber and also inside loadlock chamber...the arm dropped the wafer inside the loadlock, not sure how. Also the status page doesn't       show that there are any wafers inside either chamber....I think it failed to sense the first wafer and tried to load the second one in...All wafers are  dummies, I was trying to season the chamber.

More information about the lampoly-pcs mailing list