Shutdown lampoly SNF 2008-07-02 07:42:07: Scheduled PM

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jul 3 11:52:04 PDT 2008


Completed wet clean.  Performed gas calibration @ 30 C.  All gases are within specification.  Checked wafer handling.  Replaced the exit loadlock external door solenoid valve.  Also replaced the gap drive upper limit sensor.  Cycled 21 wafers using recipe 1 without any problems.




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