Comment lampoly SNF 2008-07-09 19:11:41: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 9 19:11:42 PDT 2008


Adjusted the thottle valve preset value from 0 to 84 and increased the He flow (transfer gas) from 1 to 12 sccm.  Able to process many wafers but still having intermittent problem.  Need urther troubleshooting.




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