Shutdown lampoly SNF 2008-07-03 17:43:35: Loads, but no processing

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jul 10 11:19:02 PDT 2008


Set the transfer gas flow to 0 sccm.  This ignores the 90 mT setpoint and allows the transfer to proceed without any problems.  Ran 10 wafers.
Modified clean recipe 99, step 4 (post clean pump step).  Increased the time to 180 sec from 15 sec. Also changed the He flow from 50 to 25 sccm.  These changes were made in order to give the turbo time to recover from the 305 sec clean.




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