Shutdown lampoly SNF 2008-07-11 12:33:02: Good news and bad...

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Jul 11 12:33:03 PDT 2008


Good news:  Elmer and Cesar did a great job -- the system no longer has errors and starts processing nicely.
Bad news:  Lower RF reflected power is high at 24 W.  No DC bias registers.
Ran a qual etch rate:  Total etch depth is 3300 A (expect 4200) and uniformity is 3%.  Resist was also burnt.




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