Problem lampoly SNF 2008-07-21 17:35:39: entrance load failed

kattsai at snf.stanford.edu kattsai at snf.stanford.edu
Mon Jul 21 17:35:39 PDT 2008


alarm message: "Entrance Load Failed Requested Rotate Action".  Wafer is stuck on flat finder arm. 




More information about the lampoly-pcs mailing list