Shutdown lampoly SNF 2008-07-22 16:09:47: Error 184: Water chiller has failed
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Tue Jul 22 21:00:19 PDT 2008
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Shutdown lampoly SNF 2008-07-22 16:09:47: Error 184: Water chiller has failed
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Problem lampoly SNF 2008-07-24 00:11:18: Wafer stuck in chamber
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Refilled chiller top and bottom..
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Shutdown lampoly SNF 2008-07-22 16:09:47: Error 184: Water chiller has failed
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Problem lampoly SNF 2008-07-24 00:11:18: Wafer stuck in chamber
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