Problem lampoly SNF 2008-07-24 00:11:18: Wafer stuck in chamber

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Thu Jul 24 00:11:18 PDT 2008


Recieved error 47 - chamber chuck down sense fail. Tried aborting the recipe to recover the wafer but this did not work. The wafer is done processing and the next wafer is a dummy for chamber clean. I was running recipe 90 and 99. Please put the wafers in the box "rhenn flash dummies" on the table next to the safety shower. 




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