From eenriquez at snf.stanford.edu Wed Jun 4 16:48:15 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Jun 2008 16:48:15 -0700 Subject: Comment lampoly SNF 2008-06-04 16:48:14: Update intermittent press fault Message-ID: Found the turbo cooling water was shut-off at the valves in the finger-wall. Turned water on and ran 7 wafers using recipe 99 with no problems. From cbaxter at snf.stanford.edu Sat Jun 7 08:01:34 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 Jun 2008 08:01:34 -0700 Subject: Shutdown lampoly SNF 2008-06-07 08:01:33: Shutdown for wet clean and re-teaching throttle valve controller. Message-ID: From cbaxter at snf.stanford.edu Sun Jun 8 15:54:38 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Jun 2008 15:54:38 -0700 Subject: Shutdown lampoly SNF 2008-06-07 08:01:33: Shutdown for wet clean and re-teaching throttle valve controller. Message-ID: Completed wet clean, auto zero the throttle valve and cleaned. Cal all gases and re-teach throttle valve controller. From ofidaner at snf.stanford.edu Mon Jun 9 13:30:15 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Mon, 9 Jun 2008 13:30:15 -0700 Subject: Problem lampoly SNF 2008-06-09 13:30:14: LL cannot pumpdown Message-ID: Dummy wafer is inside the load lock From mtang at snf.stanford.edu Mon Jun 9 14:38:59 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 9 Jun 2008 14:38:59 -0700 Subject: Shutdown lampoly SNF 2008-06-09 14:38:59: Loadlock pump is off Message-ID: From cbaxter at snf.stanford.edu Mon Jun 9 19:49:33 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Jun 2008 19:49:33 -0700 Subject: Shutdown lampoly SNF 2008-06-09 14:38:59: Loadlock pump is off Message-ID: load pump is on, i cycled the wafers on the tools w/out problem. From cbaxter at snf.stanford.edu Mon Jun 9 19:49:42 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Jun 2008 19:49:42 -0700 Subject: Problem lampoly SNF 2008-06-09 13:30:14: LL cannot pumpdown Message-ID: From eenriquez at snf.stanford.edu Wed Jun 11 18:09:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jun 2008 18:09:56 -0700 Subject: Comment lampoly SNF 2008-06-04 16:48:14: Update intermittent press fault Message-ID: Noted From eenriquez at snf.stanford.edu Wed Jun 11 18:10:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jun 2008 18:10:19 -0700 Subject: Problem lampoly SNF 2008-05-30 15:01:08: Intermittent pressure problem Message-ID: Noted From cbaxter at snf.stanford.edu Wed Jun 11 20:12:23 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Jun 2008 20:12:23 -0700 Subject: Problem lampoly SNF 2008-05-30 21:19:50: turbo pump error after ~60 sec etching on several wafers Message-ID: From tura at snf.stanford.edu Thu Jun 12 21:11:54 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 12 Jun 2008 21:11:54 -0700 Subject: Shutdown lampoly SNF 2008-06-12 21:11:54: wafer stuck inside chamber Message-ID: It gave the the alarm "the turbo is not in running condition" twice, I cleared it, it kept running. Third time it gave the same alarm I cleared again, it kept running, but the unload arm came out of the process chamber without the dummy wafer inside. It probably broke inside. Now it is stuck with the alarm "Wafer not sensed at exit cassette". 3 of my actual wafers are in the machine (1 inside the process chamber together with the dummy wafer, 1 inside the load chamber, 1 on the flat finder). I didnt try to recover them, left the machine as it is. Please recover them and put them in the boxes on the table across. Thanks! From eenriquez at snf.stanford.edu Fri Jun 13 13:56:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jun 2008 13:56:37 -0700 Subject: Shutdown lampoly SNF 2008-06-12 21:11:54: wafer stuck inside chamber Message-ID: System alarmed for wafer not found. Clear error and resumed process. Cycled wafers with no problems. From tura at snf.stanford.edu Fri Jun 13 15:02:32 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Fri, 13 Jun 2008 15:02:32 -0700 Subject: Comment lampoly SNF 2008-06-13 15:02:31: Wafer under the elevator Message-ID: I see a wafer under the load elevator From mdickey at snf.stanford.edu Mon Jun 16 13:20:57 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 16 Jun 2008 13:20:57 -0700 Subject: Comment lampoly SNF 2008-06-13 15:02:31: Wafer under the elevator Message-ID: Retrieved dropped wafer. Will leave it on top of the load lock entrance chamber From ofidaner at snf.stanford.edu Wed Jun 18 04:58:53 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Wed, 18 Jun 2008 04:58:53 -0700 Subject: Shutdown lampoly SNF 2008-06-18 04:58:52: turbo pump failure alarm Message-ID: From shott at snf.stanford.edu Wed Jun 18 08:04:06 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 18 Jun 2008 08:04:06 -0700 Subject: Shutdown lampoly SNF 2008-06-18 04:58:52: turbo pump failure alarm Message-ID: Mike Dickey restarted the turbo and encountered no problems. WIll follow up with users to see if turbo failure is occuring during processing or whether they simply found it shut off. John From mtang at snf.stanford.edu Wed Jun 18 17:13:47 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 18 Jun 2008 17:13:47 -0700 Subject: Problem lampoly SNF 2008-06-18 17:13:47: Lower RF unstable Message-ID: Checking out the reported turbo error. Ran a clean cycle (looked good) and some dummy wafers. The lower electrode RF looks unstable at 45 W. This leads to pressure error in step 7 of recipe 1 (overetch). When power is raised to 50 W, there is no error and RF is pretty stable. Maybe another clean cycle w/recipe 99? (There is now a poly-back coated quartz wafer in the dummy box for this purpose.) Also, the electrode bias is a lot lower than usual -- normally around -90/-120/-80 V or so, but is now running about 30-40V lower. Will run more tests tomorrow. It works, but is not advisable for critical etches. From ofidaner at snf.stanford.edu Thu Jun 19 03:42:26 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Thu, 19 Jun 2008 03:42:26 -0700 Subject: Shutdown lampoly SNF 2008-06-19 03:42:25: turbo error Message-ID: This time the error came when running the first (dummy) wafer. Process 90; I am not sure which step was that. Wafers in the loadlock/ chamber. From mtang at snf.stanford.edu Thu Jun 19 12:23:16 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 19 Jun 2008 12:23:16 -0700 Subject: Shutdown lampoly SNF 2008-06-19 03:42:25: turbo error Message-ID: Ran clean cycle using a quartz wafer and wafers on recipes 90 and 1. I don't know why, but everything looks good. No errors (other than 307 and 017, gap stabilization time and MFC zero offset which clear themselves). I don't think the clean is responsible. Even the DC bias looks normal now in recipe 1. Lower RF electrode is stable (well, as much as it has been.) Will leave in yellow -- please report any problems - describe the error message number and the state of the machine at the time of the error (i.e., which recipe and which step in the recipe), if you can. From news at discount-educational-software.net Mon Jun 23 09:38:19 2008 From: news at discount-educational-software.net (Educational Software Newsletter) Date: Mon, 23 Jun 2008 12:38:19 -0400 Subject: Educational Software News - June 2008 Message-ID: Computer Products for Education is pleased to provide Educational Software News to qualified students, faculty, staff, and schools for current news on pricing and availability of Academic Edition Software from Microsoft, Adobe, Corel, Autodesk, Quark, EndNote, FileMaker, and many other major software manufacturers. Windows Vista Service Pack 1 (SP1) is now available! Full versions are available in 32-bit and 64-bit editions. Please visit our website for more information: http://www.discount-educational-software.net or call 800-679-7007. Educational software is exclusively available to Qualified Students, Faculty, Staff and Schools of K-12 and Higher Education institutions. 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However, if you do not wish to receive any more newsletters from CPE, please use the following link: http://www.discount-educational-software.net/rem.asp?a=remv&e=lampoly-pcs at snf.stanford.edu Or call 800-679-7007 for additional options. __________________________ Sincerely, Computer Products for Education 5325 140th Avenue North Clearwater, Florida 33760 Tel: 800-679-7007 Fax: 800-679-6996 support at discount-educational-software.net ___________________ THANK YOU!!! From maryamzm at snf.stanford.edu Mon Jun 30 23:13:30 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Mon, 30 Jun 2008 23:13:30 -0700 Subject: Shutdown lampoly SNF 2008-06-30 23:13:30: Wafer stuck Message-ID: The load arm failed to sense the wafer while unloading from the etch chamber...it dropped the wafer and it's sitting inside the exit loadlock. The arm is sticking outside the loadlock, trying to unload the dropped wafer. It thinks that it's trying to unload a wafer and the output cassette is full!!!! There is a wafer inside the etch chamber that finished etching normally but I halted the process (on step 8) since I was worried that the arm would smash the wafer inside loadlock if it tried to unload the wafer from etch chamber. Both wafers in there are real device wafers, please put them in the box on the table infront of lampoly.