Comment lampoly SNF 2008-06-04 16:48:14: Update intermittent press fault

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 4 16:48:15 PDT 2008


Found the turbo cooling water  was shut-off at the valves in the finger-wall.  Turned water on and ran 7 wafers using recipe 99 with no problems.




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