Comment lampoly SNF 2008-06-04 16:48:14: Update intermittent press fault
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Jun 4 16:48:15 PDT 2008
Found the turbo cooling water was shut-off at the valves in the finger-wall. Turned water on and ran 7 wafers using recipe 99 with no problems.
More information about the lampoly-pcs
mailing list