Problem lampoly SNF 2008-06-09 13:30:14: LL cannot pumpdown

ofidaner at snf.stanford.edu ofidaner at snf.stanford.edu
Mon Jun 9 13:30:15 PDT 2008

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Dummy wafer is inside the load lock

Previous message: Shutdown lampoly SNF 2008-06-07 08:01:33: Shutdown for wet clean and re-teaching throttle valve controller.
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