Problem lampoly SNF 2008-05-30 15:01:08: Intermittent pressure problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 11 18:10:19 PDT 2008

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Previous message: Shutdown lampoly SNF 2008-06-09 14:38:59: Loadlock pump is off
Next message: Problem lampoly SNF 2008-05-30 21:19:50: turbo pump error after ~60 sec etching on several wafers
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