Shutdown lampoly SNF 2008-06-19 03:42:25: turbo error

ofidaner at snf.stanford.edu ofidaner at snf.stanford.edu
Thu Jun 19 03:42:26 PDT 2008

Previous message: Problem lampoly SNF 2008-06-18 17:13:47: Lower RF unstable
Next message: Shutdown lampoly SNF 2008-06-19 03:42:25: turbo error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

This time the error came when running the first (dummy) wafer.  Process 90; I am not sure which step was that.  Wafers in the loadlock/ chamber.

Previous message: Problem lampoly SNF 2008-06-18 17:13:47: Lower RF unstable
Next message: Shutdown lampoly SNF 2008-06-19 03:42:25: turbo error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list