Shutdown lampoly SNF 2008-06-19 03:42:25: turbo error

ofidaner at snf.stanford.edu ofidaner at snf.stanford.edu
Thu Jun 19 03:42:26 PDT 2008


This time the error came when running the first (dummy) wafer.  Process 90; I am not sure which step was that.  Wafers in the loadlock/ chamber.




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