June 2008 Archives by date

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Starting: Wed Jun 4 16:48:15 PDT 2008
Ending: Mon Jun 30 23:13:30 PDT 2008
Messages: 21

• Comment lampoly SNF 2008-06-04 16:48:14: Update intermittent press fault   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-06-07 08:01:33: Shutdown for wet clean and re-teaching throttle valve controller.   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2008-06-07 08:01:33: Shutdown for wet clean and re-teaching throttle valve controller.   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2008-06-09 13:30:14: LL cannot pumpdown   ofidaner at snf.stanford.edu
• Shutdown lampoly SNF 2008-06-09 14:38:59: Loadlock pump is off   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2008-06-09 14:38:59: Loadlock pump is off   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2008-06-09 13:30:14: LL cannot pumpdown   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2008-06-04 16:48:14: Update intermittent press fault   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-05-30 15:01:08: Intermittent pressure problem   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-05-30 21:19:50: turbo pump error after ~60 sec etching on several wafers   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2008-06-12 21:11:54: wafer stuck inside chamber   tura at snf.stanford.edu
• Shutdown lampoly SNF 2008-06-12 21:11:54: wafer stuck inside chamber   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-06-13 15:02:31: Wafer under the elevator   tura at snf.stanford.edu
• Comment lampoly SNF 2008-06-13 15:02:31: Wafer under the elevator   mdickey at snf.stanford.edu
• Shutdown lampoly SNF 2008-06-18 04:58:52: turbo pump failure alarm   ofidaner at snf.stanford.edu
• Shutdown lampoly SNF 2008-06-18 04:58:52: turbo pump failure alarm   shott at snf.stanford.edu
• Problem lampoly SNF 2008-06-18 17:13:47: Lower RF unstable   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2008-06-19 03:42:25: turbo error   ofidaner at snf.stanford.edu
• Shutdown lampoly SNF 2008-06-19 03:42:25: turbo error   mtang at snf.stanford.edu
• Educational Software News - June 2008   Educational Software Newsletter
• Shutdown lampoly SNF 2008-06-30 23:13:30: Wafer stuck   maryamzm at snf.stanford.edu

Last message date: Mon Jun 30 23:13:30 PDT 2008
Archived on: Sun Dec 23 09:06:09 PST 2012

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