From eenriquez at snf.stanford.edu Mon Mar 3 13:10:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Mar 2008 13:10:38 -0800 Subject: Comment lampoly SNF 2008-03-03 13:10:37: Update Message-ID: The exit load lock inner door intermittently does not close. From eenriquez at snf.stanford.edu Wed Mar 5 17:45:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Mar 2008 17:45:02 -0800 Subject: Comment lampoly SNF 2008-03-05 17:45:02: Update Message-ID: Installed new turbo pump. Now system has a vacuum leak (~ 300 mT/min). Will leak continue leak check tomorrow. From eenriquez at snf.stanford.edu Fri Mar 7 14:14:44 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Mar 2008 14:14:44 -0800 Subject: Comment lampoly SNF 2008-03-07 14:14:43: Update Message-ID: Found a large leak but was not able to locate the source. Repaired a couple of small leaks. Possible source of large leak is a tee that is covered with heat tape. We will continue troubleshooting on Monday. From eenriquez at snf.stanford.edu Mon Mar 10 14:31:13 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Mar 2008 14:31:13 -0700 Subject: Comment lampoly SNF 2008-03-10 14:31:12: Update Message-ID: Found the large vacuum leak. Now leak rate is about 15 mT/min. The leaky component is a heat wrappec tee connector. Need make the tee repair permanent. Also still need to troubleshoot why the gap drive brake is not turning on and why the 10 Torr manometer is not working. From eenriquez at snf.stanford.edu Wed Mar 12 18:41:01 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Mar 2008 18:41:01 -0700 Subject: Comment lampoly SNF 2008-03-12 18:41:00: Update Message-ID: Field service will be here by noon ttomorrow to repair the Gap drive break problem. From eenriquez at snf.stanford.edu Thu Mar 13 15:21:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Mar 2008 15:21:21 -0700 Subject: Comment lampoly SNF 2008-03-13 15:21:20: Update Message-ID: Field service repaired the gap brake problem. During testing, the system still failed for a leak. Will leak check again tomorrow. From eenriquez at snf.stanford.edu Fri Mar 14 14:21:15 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Mar 2008 14:21:15 -0700 Subject: Comment lampoly SNF 2008-03-14 14:21:15: Update Message-ID: Found a leaky turbo foreline valve. Need to repair or replace. From eenriquez at snf.stanford.edu Tue Mar 18 14:20:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Mar 2008 14:20:02 -0700 Subject: Comment lampoly SNF 2008-03-18 14:20:01: Update Message-ID: Cleaned the throttle valve. Will test tomorrow. From eenriquez at snf.stanford.edu Wed Mar 19 18:40:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Mar 2008 18:40:56 -0700 Subject: Comment lampoly SNF 2008-03-19 18:40:56: Update Message-ID: Repaired the turbo foreline valve. Still unable to find the source of the large gas load. Called field service. They might be in tomorrow. Will update by 9:00am. From mtang at snf.stanford.edu Wed Mar 26 11:26:51 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 26 Mar 2008 11:26:51 -0700 Subject: Comment lampoly SNF 2008-03-26 11:26:50: Update Message-ID: Steve, the vendor, replaced the throttlw valve controller because pressure readouts/controls were not consistent. Pressure now controls. However, RF does not tune now. He will be back to reset tuning setpoints. From mtang at snf.stanford.edu Mon Mar 31 16:31:37 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 31 Mar 2008 16:31:37 -0700 Subject: Comment lampoly SNF 2008-03-31 16:31:36: Update Message-ID: I found the VAT controller manual online (google "VAT adaptive pressure controller") which explained the procedure for doing auto size setup, sensor setup, zero adjust, then learn. Got through the first three steps, but couldn't figure out how to flow gases. Anyway, managed to get the wafers out. But now it thinks there's a wafer in the process chamber, and there isn't (I put the chamber into ACTIVE thinking to flow process gases, but this didn't do it.) Anyway, I'm really thinking the problem is in the VAT -- and calibrating it properly.