From rik at snf.stanford.edu Thu May 1 13:42:32 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Thu, 1 May 2008 13:42:32 -0700 Subject: Problem lampoly SNF 2008-05-01 13:42:32: Alarm 322 on machine Message-ID: Message -- Alarm 322: Internal timer will overflow in 22 hours. System needs restart. From eenriquez at snf.stanford.edu Mon May 5 10:10:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 May 2008 10:10:37 -0700 Subject: Problem lampoly SNF 2008-05-01 13:42:32: Alarm 322 on machine Message-ID: Ran 6 wafers using recipe 1 without any problems. From sanjah at snf.stanford.edu Mon May 5 23:19:09 2008 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Mon, 5 May 2008 23:19:09 -0700 Subject: Problem lampoly SNF 2008-05-05 23:19:09: turbo pump failed during processing Message-ID: From eenriquez at snf.stanford.edu Tue May 6 09:43:55 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 May 2008 09:43:55 -0700 Subject: Comment lampoly SNF 2008-05-06 09:43:54: Update Message-ID: Ran 8 wafers using recipe #1 and 8 wafers running recipe #90 with no problems. From mtang at snf.stanford.edu Tue May 6 17:12:46 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 6 May 2008 17:12:46 -0700 Subject: Comment lampoly SNF 2008-05-06 17:12:46: Pressure control errors Message-ID: Tried running processes 99, 91, 25, and 1. (Did not try 77). Spent most of the time playing with recipe 99. Pressure controls very nicely for the most part, but fails about one minute into the main etch. It fails only when the plasma is on (looks fine with just gases). This seems to coincide with the loadlocks reaching ATM, but there does not appear to be a leak. Will need to modify recipe 99 to have a clamping step to get rid of the 217 error. Will continue checking tomorrow. Looks OK for recipes 1 and 25. From sanjah at snf.stanford.edu Tue May 6 20:22:46 2008 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Tue, 6 May 2008 20:22:46 -0700 Subject: Problem lampoly SNF 2008-05-06 20:22:45: Error: Enterance load - failed requested rotate action Message-ID: From eenriquez at snf.stanford.edu Wed May 7 10:37:50 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 May 2008 10:37:50 -0700 Subject: Problem lampoly SNF 2008-05-06 20:22:45: Error: Enterance load - failed requested rotate action Message-ID: Reset the handler to clear the error and ran 20 wafers with no problems. From rhenn at snf.stanford.edu Wed May 7 15:53:49 2008 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Wed, 7 May 2008 15:53:49 -0700 Subject: Problem lampoly SNF 2008-05-07 15:53:48: Turbo Pump Failure Errors 251, 252, 254 Message-ID: Turbo pump failure occurred in step 5 of recipe 90. The errors return within seconds of clearing the error. I was able to run recipe 99 before recipe 90 with no problems. From rhenn at snf.stanford.edu Wed May 7 18:13:18 2008 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Wed, 7 May 2008 18:13:18 -0700 Subject: Problem lampoly SNF 2008-05-07 18:13:17: Particles at bottom of trenches Message-ID: Ran recipe 90 with time = 500 s. Particles are clearly visible at the bottom of the trenches. The density of particles varies across the wafer and the particle density is high enough that at least 50% of the bottom of the trenches is dark. Particles are only seen at the bottom of the trenches. From mtang at snf.stanford.edu Fri May 9 13:45:03 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 9 May 2008 13:45:03 -0700 Subject: Shutdown lampoly SNF 2008-05-09 13:45:03: Chamber clean and Clean recipe check Message-ID: Hi all -- We learned from the more experienced Berkeley folk that the black particles are redeposited buildup from using the HBr-only recipe, without the clean recipe. Since the clean has been faulting during the etch, we have not been able to run the full clean. The system is undergoing chamber purge now and the chamber will be cleaned first thing Monday. Apologies for the inconvenience, but we don't want to risk contaminating people's wafers. We will also work on troubleshooting the clean recipe failure, which appears it might be an RF problem which is manifested as a pressure control/turbo failure. From eenriquez at snf.stanford.edu Mon May 12 12:11:29 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 May 2008 12:11:29 -0700 Subject: Shutdown lampoly SNF 2008-05-09 13:45:03: Chamber clean and Clean recipe check Message-ID: Wet cleaned the chamber. Reinstalled the repaired manometer tee. Ran 5 wafers using recipe 99 with no problems. From eenriquez at snf.stanford.edu Mon May 12 12:11:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 May 2008 12:11:37 -0700 Subject: Problem lampoly SNF 2008-05-07 18:13:17: Particles at bottom of trenches Message-ID: Wet cleaned the chamber. Reinstalled the repaired manometer tee. Ran 5 wafers using recipe 99 with no problems. From eenriquez at snf.stanford.edu Mon May 12 12:12:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 May 2008 12:12:26 -0700 Subject: Problem lampoly SNF 2008-04-17 22:28:34: Recipe 99 keeps aborting Message-ID: Wet cleaned the chamber. Reinstalled the repaired manometer tee. Ran 5 wafers using recipe 99 with no problems. From eenriquez at snf.stanford.edu Mon May 12 12:12:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 May 2008 12:12:33 -0700 Subject: Problem lampoly SNF 2008-04-22 22:44:16: Recipe 99 aborts with hard set to 20% Message-ID: Wet cleaned the chamber. Reinstalled the repaired manometer tee. Ran 5 wafers using recipe 99 with no problems. From mtang at snf.stanford.edu Mon May 12 13:49:42 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 12 May 2008 13:49:42 -0700 Subject: Comment lampoly SNF 2008-05-12 13:49:41: Looks good Message-ID: Cleans run very nicely now. Warming up the system and running etch rate. Am running of to yet another meeting now, so if someone needs it, you may go ahead and enable over me once the 6 wafers are done (in about 15 minutes or so). From sanjah at snf.stanford.edu Mon May 12 14:47:18 2008 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Mon, 12 May 2008 14:47:18 -0700 Subject: Shutdown lampoly SNF 2008-05-12 14:47:17: wafer lift failed Message-ID: From mtang at snf.stanford.edu Mon May 12 17:20:16 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 12 May 2008 17:20:16 -0700 Subject: Comment lampoly SNF 2008-05-12 17:20:15: Shutdown Errors Message-ID: The alarms on the system which do not clear are: 376: Gap is not reaching setpoint 028: Exit loadlock pumpdown failing to crossover 040: Entrance loadlock pumpdown failing to crossover There is a wafer in the loadlock, but both loadlocks are at atmosphere. I don't know if the gap drive error is related in some strange way, but should remember to replace the gap drive limit switch, which is somewhat damaged. From mtang at snf.stanford.edu Mon May 12 17:22:12 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 12 May 2008 17:22:12 -0700 Subject: Comment lampoly SNF 2008-05-12 17:22:11: Etch rate qual Message-ID: On the positive side of things, the etch rate looks good: Average etch rate is 4740 with 1.0% nonuniformity. Selectivity of Si to resist is 3.32. From eenriquez at snf.stanford.edu Tue May 13 10:24:07 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 May 2008 10:24:07 -0700 Subject: Shutdown lampoly SNF 2008-05-13 10:24:06: Load lock pump failure Message-ID: Unable to restart the loadlock pump. Will install a new pump.Should be ready by noon on Friday. From eenriquez at snf.stanford.edu Fri May 16 12:14:17 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 May 2008 12:14:17 -0700 Subject: Comment lampoly SNF 2008-05-16 12:14:16: Update Message-ID: New pump is installed and running but the loadlock(s) or pump line has a big leak. Only able to pumpdown to 5 T. The pump by itself pumps down to 50 mT. From cbaxter at snf.stanford.edu Sun May 18 11:26:53 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 18 May 2008 11:26:53 -0700 Subject: Shutdown lampoly SNF 2008-05-13 10:24:06: Load lock pump failure Message-ID: Hooked up external vacuum gauge on load lock foreline behind the tool, with both entrance and exit load isolation valve close, foreline only pump above 1torr. Noticed a kf50 clamp hanging on kf50 adaptor flange and I can hear a loud hissing sound, kf50 clamp most likely came off loose due to vibration. Installed kf50 clamp on kf50 adaptor flange below the concrete floor. Now both entrance and exit load lock pumped down below 10m/t. Cycled 10 dummy wafers using recipe #1 w/out problem. From cbaxter at snf.stanford.edu Sun May 18 11:32:22 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 18 May 2008 11:32:22 -0700 Subject: Shutdown lampoly SNF 2008-05-12 14:47:17: wafer lift failed Message-ID: Cycled wafers using recipe#1 and could not duplicate lifter pin error and checked i/o page and pins up/down sesnor is working fine. From cbaxter at snf.stanford.edu Sun May 18 11:44:11 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 18 May 2008 11:44:11 -0700 Subject: Comment lampoly SNF 2008-05-16 12:14:16: Update Message-ID: Found kf50 clamp just hanging on the kf50 adaptor flange on foreline below the concrete floor. From ericp at snf.stanford.edu Sun May 18 15:49:21 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 18 May 2008 15:49:21 -0700 Subject: Problem lampoly SNF 2008-05-18 15:49:19: Small coolant leak Message-ID: The LAM appears to be "off". Discovered a small coolant leak where the coolant lines come through the floor. From sanjah at snf.stanford.edu Mon May 19 09:29:32 2008 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Mon, 19 May 2008 09:29:32 -0700 Subject: Problem lampoly SNF 2008-05-19 09:29:30: ALARM: The water chiller has failed Message-ID: From cbaxter at snf.stanford.edu Mon May 19 19:18:26 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 19 May 2008 19:18:26 -0700 Subject: Problem lampoly SNF 2008-05-19 09:29:30: ALARM: The water chiller has failed Message-ID: Reset chiller and cycled wafers using recipe#91. From cbaxter at snf.stanford.edu Mon May 19 19:19:28 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 19 May 2008 19:19:28 -0700 Subject: Problem lampoly SNF 2008-05-18 15:49:19: Small coolant leak Message-ID: monitor cooling behind the tool, so far it looks ok. From mtang at snf.stanford.edu Tue May 27 08:56:55 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 May 2008 08:56:55 -0700 Subject: Comment lampoly SNF 2008-04-11 16:48:42: Minor errors Message-ID: From mtang at snf.stanford.edu Tue May 27 08:58:20 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 May 2008 08:58:20 -0700 Subject: Problem lampoly SNF 2008-04-14 17:03:39: alarm:252, 253 Message-ID: Problem has not recurred since chamber clean. From mtang at snf.stanford.edu Tue May 27 08:58:39 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 May 2008 08:58:39 -0700 Subject: Comment lampoly SNF 2008-04-27 14:20:37: Need more oxide wafers for Recipe 99 Message-ID: LTO dummies in the box. From mtang at snf.stanford.edu Tue May 27 09:02:12 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 May 2008 09:02:12 -0700 Subject: Problem lampoly SNF 2008-05-05 23:19:09: turbo pump failed during processing Message-ID: Failure occurs during clean processes when high power is used and the chamber is in need of a wet clean. RF becomes unstable, causing pressure to fluctuate wildly, leading to turbo pump to switch off. From mtang at snf.stanford.edu Tue May 27 09:03:11 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 May 2008 09:03:11 -0700 Subject: Comment lampoly SNF 2008-05-06 09:43:54: Update Message-ID: Failures were obseved with recipes using high power. Now we know. From mtang at snf.stanford.edu Tue May 27 09:04:06 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 May 2008 09:04:06 -0700 Subject: Comment lampoly SNF 2008-05-06 17:12:46: Pressure control errors Message-ID: See problem resolution for 5/5/08. From mtang at snf.stanford.edu Tue May 27 09:04:24 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 May 2008 09:04:24 -0700 Subject: Problem lampoly SNF 2008-05-07 15:53:48: Turbo Pump Failure Errors 251, 252, 254 Message-ID: See problem resolution for 5/5/08. From mtang at snf.stanford.edu Tue May 27 09:04:33 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 May 2008 09:04:33 -0700 Subject: Comment lampoly SNF 2008-05-12 13:49:41: Looks good Message-ID: From mtang at snf.stanford.edu Tue May 27 09:05:10 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 May 2008 09:05:10 -0700 Subject: Comment lampoly SNF 2008-05-12 17:20:15: Shutdown Errors Message-ID: See shutdown resolution for 5/13/08. From mtang at snf.stanford.edu Tue May 27 09:05:16 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 May 2008 09:05:16 -0700 Subject: Comment lampoly SNF 2008-05-12 17:22:11: Etch rate qual Message-ID: From maryamzm at snf.stanford.edu Tue May 27 20:23:39 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Tue, 27 May 2008 20:23:39 -0700 Subject: Problem lampoly SNF 2008-05-27 20:23:38: WAFER STUCK INSIDE Message-ID: The exit loadlock sensor failed...So it's not unloading wafers.There's a wafer stuck inside the chamber. I put my box right next to the lampoly dummy box. From eenriquez at snf.stanford.edu Wed May 28 09:16:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 May 2008 09:16:37 -0700 Subject: Comment lampoly SNF 2008-05-28 09:16:36: Update Message-ID: Recovered your sexy wafers Recovered user's wafers and placed them in her wafer box. Now cycling wafers using the user's recipe. From eenriquez at snf.stanford.edu Wed May 28 11:14:03 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 May 2008 11:14:03 -0700 Subject: Problem lampoly SNF 2008-05-27 20:23:38: WAFER STUCK INSIDE Message-ID: Recovered user's wafers. Ran 16 wafers using the user's recipe with no problems. From eenriquez at snf.stanford.edu Wed May 28 11:14:14 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 May 2008 11:14:14 -0700 Subject: Comment lampoly SNF 2008-05-28 09:16:36: Update Message-ID: Noted. From maryamzm at snf.stanford.edu Thu May 29 18:47:32 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Thu, 29 May 2008 18:47:32 -0700 Subject: Shutdown lampoly SNF 2008-05-29 18:47:31: TURBO PUMP FAILURE Message-ID: I got turbo pump failure and turbo pump cannot start alarms ( 251, 252, 254). I was able to get my wafers out of the chamber. From eenriquez at snf.stanford.edu Fri May 30 08:19:39 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 May 2008 08:19:39 -0700 Subject: Comment lampoly SNF 2008-05-30 08:19:38: Update Message-ID: Found the turbo pump shutdown from an error. Also, found no process recipe loaded. Now cycling wafers using recipe 1. From eenriquez at snf.stanford.edu Fri May 30 14:56:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 May 2008 14:56:43 -0700 Subject: Shutdown lampoly SNF 2008-05-29 18:47:31: TURBO PUMP FAILURE Message-ID: Restarted the turbo. Processed 20 wafers using recipe 1. Had 2 "over 3 Torr" alarms. Cleared alarm and process continued. The alarms did not shutdown the turbo. From eenriquez at snf.stanford.edu Fri May 30 14:56:55 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 May 2008 14:56:55 -0700 Subject: Comment lampoly SNF 2008-05-30 08:19:38: Update Message-ID: Noted From eenriquez at snf.stanford.edu Fri May 30 15:01:08 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 May 2008 15:01:08 -0700 Subject: Problem lampoly SNF 2008-05-30 15:01:08: Intermittent pressure problem Message-ID: Intermittently faulting for the "ch. over 3 Torr". Clear the alarm and the process should continue. Field service will perform a PM on the system next Wed. From sanjah at snf.stanford.edu Fri May 30 21:19:51 2008 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Fri, 30 May 2008 21:19:51 -0700 Subject: Problem lampoly SNF 2008-05-30 21:19:50: turbo pump error after ~60 sec etching on several wafers Message-ID: and the chamber temperature is too high - 48 C (setpoint is 45 C)