Comment lampoly SNF 2008-05-06 17:12:46: Pressure control errors

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue May 6 17:12:46 PDT 2008


Tried running processes 99, 91, 25, and 1.  (Did not try 77).  Spent most of the time playing with recipe 99.  Pressure controls very nicely for the most part, but fails about one minute into the main etch.  It fails only when the plasma is on (looks fine with just gases).  This seems to coincide with the loadlocks reaching ATM, but there does not appear to be a leak.  Will need to modify recipe 99 to have a clamping step to get rid of the 217 error.  Will continue checking tomorrow.  Looks OK for recipes 1 and 25.




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