Problem lampoly SNF 2008-05-07 18:13:17: Particles at bottom of trenches

rhenn at snf.stanford.edu rhenn at snf.stanford.edu
Wed May 7 18:13:18 PDT 2008


Ran recipe 90 with time = 500 s. Particles are clearly visible at the bottom of the trenches. The density of particles varies across the wafer and the particle density is high enough that at least 50% of the bottom of the trenches is dark. Particles are only seen at the bottom of the trenches.




More information about the lampoly-pcs mailing list