Problem lampoly SNF 2008-05-07 18:13:17: Particles at bottom of trenches

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 12 12:11:37 PDT 2008


Wet cleaned the chamber.  Reinstalled the repaired manometer tee.  Ran 5 wafers using recipe 99 with no problems.




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