Problem lampoly SNF 2008-04-17 22:28:34: Recipe 99 keeps aborting

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 12 12:12:26 PDT 2008


Wet cleaned the chamber.  Reinstalled the repaired manometer tee.  Ran 5 wafers using recipe 99 with no problems.




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