Problem lampoly SNF 2008-04-22 22:44:16: Recipe 99 aborts with hard set to 20%

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 12 12:12:33 PDT 2008


Wet cleaned the chamber.  Reinstalled the repaired manometer tee.  Ran 5 wafers using recipe 99 with no problems.




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