Comment lampoly SNF 2008-05-12 13:49:41: Looks good

mtang at mtang at
Mon May 12 13:49:42 PDT 2008

Cleans run very nicely now.  Warming up the system and running etch rate.  Am running of to yet another meeting now, so if someone needs it, you may go ahead and enable over me once the 6 wafers are done (in about 15 minutes or so).

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