Comment lampoly SNF 2008-05-12 17:20:15: Shutdown Errors

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon May 12 17:20:16 PDT 2008


The alarms on the system which do not clear are:
376:  Gap is not reaching setpoint
028:  Exit loadlock pumpdown failing to crossover
040:  Entrance loadlock pumpdown failing to crossover
There is a wafer in the loadlock, but both loadlocks are at atmosphere.  I don't know if the gap drive error is related in some strange way, but should remember to replace the gap drive limit switch, which is somewhat damaged.




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