Comment lampoly SNF 2008-05-12 17:22:11: Etch rate qual

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon May 12 17:22:12 PDT 2008


On the positive side of things, the etch rate looks good:
Average etch rate is 4740 with 1.0% nonuniformity.  Selectivity of Si to resist is 3.32.




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