Shutdown lampoly SNF 2008-05-13 10:24:06: Load lock pump failure

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun May 18 11:26:53 PDT 2008


Hooked up external vacuum gauge on load lock foreline
behind the tool, with both entrance and exit load isolation
valve close, foreline only pump above 1torr.  Noticed a kf50
clamp hanging  on kf50 adaptor flange and I can hear a loud
hissing sound, kf50 clamp most likely came off loose due to
vibration.  Installed kf50 clamp on kf50 adaptor flange below
the concrete floor. Now both entrance and exit load lock pumped down below 10m/t. Cycled 10 dummy wafers using recipe
#1 w/out problem.
 




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