Shutdown lampoly SNF 2008-05-12 14:47:17: wafer lift failed

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun May 18 11:32:22 PDT 2008


Cycled wafers using recipe#1 and could not duplicate
lifter pin error and checked i/o page  and pins up/down
sesnor is working fine.




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