Problem lampoly SNF 2008-04-14 17:03:39: alarm:252, 253
mtang at snf.stanford.edu
mtang at snf.stanford.edu
Tue May 27 08:58:20 PDT 2008
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Comment lampoly SNF 2008-04-11 16:48:42: Minor errors
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Comment lampoly SNF 2008-04-27 14:20:37: Need more oxide wafers for Recipe 99
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Problem has not recurred since chamber clean.
Previous message:
Comment lampoly SNF 2008-04-11 16:48:42: Minor errors
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Comment lampoly SNF 2008-04-27 14:20:37: Need more oxide wafers for Recipe 99
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