Problem lampoly SNF 2008-05-05 23:19:09: turbo pump failed during processing

mtang at mtang at
Tue May 27 09:02:12 PDT 2008

Failure occurs during clean processes when high power is used and the chamber is in need of a wet clean.  RF becomes unstable, causing pressure to fluctuate wildly, leading to turbo pump to switch off.

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