Problem lampoly SNF 2008-05-27 20:23:38: WAFER STUCK INSIDE

maryamzm at snf.stanford.edu maryamzm at snf.stanford.edu
Tue May 27 20:23:39 PDT 2008


The exit loadlock sensor failed...So it's not unloading wafers.There's a wafer stuck inside the chamber. I put my box right next to the lampoly dummy box.




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