Shutdown lampoly SNF 2008-05-29 18:47:31: TURBO PUMP FAILURE

maryamzm at snf.stanford.edu maryamzm at snf.stanford.edu
Thu May 29 18:47:32 PDT 2008


I got turbo pump failure and turbo pump cannot start alarms (  251, 252, 254).  I was able to get my wafers out of the chamber.




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