Comment lampoly SNF 2008-05-30 08:19:38: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri May 30 08:19:39 PDT 2008


Found the turbo pump shutdown from an error.  Also, found no process recipe loaded.  
Now cycling wafers using recipe 1. 




More information about the lampoly-pcs mailing list