Shutdown lampoly SNF 2008-05-29 18:47:31: TURBO PUMP FAILURE

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri May 30 14:56:43 PDT 2008


Restarted the turbo.  Processed 20 wafers using recipe 1.  Had 2 "over 3 Torr" alarms.  Cleared alarm and process continued.  The alarms did not shutdown the turbo.




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