May 2008 Archives by author

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Starting: Thu May 1 13:42:32 PDT 2008
Ending: Fri May 30 21:19:51 PDT 2008
Messages: 47

Shutdown lampoly SNF 2008-05-13 10:24:06: Load lock pump failure cbaxter at snf.stanford.edu
Shutdown lampoly SNF 2008-05-12 14:47:17: wafer lift failed cbaxter at snf.stanford.edu
Comment lampoly SNF 2008-05-16 12:14:16: Update cbaxter at snf.stanford.edu
Problem lampoly SNF 2008-05-19 09:29:30: ALARM: The water chiller has failed cbaxter at snf.stanford.edu
Problem lampoly SNF 2008-05-18 15:49:19: Small coolant leak cbaxter at snf.stanford.edu
Problem lampoly SNF 2008-05-01 13:42:32: Alarm 322 on machine eenriquez at snf.stanford.edu
Comment lampoly SNF 2008-05-06 09:43:54: Update eenriquez at snf.stanford.edu
Problem lampoly SNF 2008-05-06 20:22:45: Error: Enterance load - failed requested rotate action eenriquez at snf.stanford.edu
Shutdown lampoly SNF 2008-05-09 13:45:03: Chamber clean and Clean recipe check eenriquez at snf.stanford.edu
Problem lampoly SNF 2008-05-07 18:13:17: Particles at bottom of trenches eenriquez at snf.stanford.edu
Problem lampoly SNF 2008-04-17 22:28:34: Recipe 99 keeps aborting eenriquez at snf.stanford.edu
Problem lampoly SNF 2008-04-22 22:44:16: Recipe 99 aborts with hard set to 20% eenriquez at snf.stanford.edu
Shutdown lampoly SNF 2008-05-13 10:24:06: Load lock pump failure eenriquez at snf.stanford.edu
Comment lampoly SNF 2008-05-16 12:14:16: Update eenriquez at snf.stanford.edu
Comment lampoly SNF 2008-05-28 09:16:36: Update eenriquez at snf.stanford.edu
Problem lampoly SNF 2008-05-27 20:23:38: WAFER STUCK INSIDE eenriquez at snf.stanford.edu
Comment lampoly SNF 2008-05-28 09:16:36: Update eenriquez at snf.stanford.edu
Comment lampoly SNF 2008-05-30 08:19:38: Update eenriquez at snf.stanford.edu
Shutdown lampoly SNF 2008-05-29 18:47:31: TURBO PUMP FAILURE eenriquez at snf.stanford.edu
Comment lampoly SNF 2008-05-30 08:19:38: Update eenriquez at snf.stanford.edu
Problem lampoly SNF 2008-05-30 15:01:08: Intermittent pressure problem eenriquez at snf.stanford.edu
Problem lampoly SNF 2008-05-18 15:49:19: Small coolant leak ericp at snf.stanford.edu
Problem lampoly SNF 2008-05-27 20:23:38: WAFER STUCK INSIDE maryamzm at snf.stanford.edu
Shutdown lampoly SNF 2008-05-29 18:47:31: TURBO PUMP FAILURE maryamzm at snf.stanford.edu
Comment lampoly SNF 2008-05-06 17:12:46: Pressure control errors mtang at snf.stanford.edu
Shutdown lampoly SNF 2008-05-09 13:45:03: Chamber clean and Clean recipe check mtang at snf.stanford.edu
Comment lampoly SNF 2008-05-12 13:49:41: Looks good mtang at snf.stanford.edu
Comment lampoly SNF 2008-05-12 17:20:15: Shutdown Errors mtang at snf.stanford.edu
Comment lampoly SNF 2008-05-12 17:22:11: Etch rate qual mtang at snf.stanford.edu
Comment lampoly SNF 2008-04-11 16:48:42: Minor errors mtang at snf.stanford.edu
Problem lampoly SNF 2008-04-14 17:03:39: alarm:252, 253 mtang at snf.stanford.edu
Comment lampoly SNF 2008-04-27 14:20:37: Need more oxide wafers for Recipe 99 mtang at snf.stanford.edu
Problem lampoly SNF 2008-05-05 23:19:09: turbo pump failed during processing mtang at snf.stanford.edu
Comment lampoly SNF 2008-05-06 09:43:54: Update mtang at snf.stanford.edu
Comment lampoly SNF 2008-05-06 17:12:46: Pressure control errors mtang at snf.stanford.edu
Problem lampoly SNF 2008-05-07 15:53:48: Turbo Pump Failure Errors 251, 252, 254 mtang at snf.stanford.edu
Comment lampoly SNF 2008-05-12 13:49:41: Looks good mtang at snf.stanford.edu
Comment lampoly SNF 2008-05-12 17:20:15: Shutdown Errors mtang at snf.stanford.edu
Comment lampoly SNF 2008-05-12 17:22:11: Etch rate qual mtang at snf.stanford.edu
Problem lampoly SNF 2008-05-07 15:53:48: Turbo Pump Failure Errors 251, 252, 254 rhenn at snf.stanford.edu
Problem lampoly SNF 2008-05-07 18:13:17: Particles at bottom of trenches rhenn at snf.stanford.edu
Problem lampoly SNF 2008-05-01 13:42:32: Alarm 322 on machine rik at snf.stanford.edu
Problem lampoly SNF 2008-05-05 23:19:09: turbo pump failed during processing sanjah at snf.stanford.edu
Problem lampoly SNF 2008-05-06 20:22:45: Error: Enterance load - failed requested rotate action sanjah at snf.stanford.edu
Shutdown lampoly SNF 2008-05-12 14:47:17: wafer lift failed sanjah at snf.stanford.edu
Problem lampoly SNF 2008-05-19 09:29:30: ALARM: The water chiller has failed sanjah at snf.stanford.edu
Problem lampoly SNF 2008-05-30 21:19:50: turbo pump error after ~60 sec etching on several wafers sanjah at snf.stanford.edu

Last message date: Fri May 30 21:19:51 PDT 2008
Archived on: Sun Dec 23 09:06:08 PST 2012

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