From eenriquez at snf.stanford.edu Wed Oct 1 07:24:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Oct 2008 07:24:25 -0700 Subject: Comment lampoly SNF 2008-09-29 16:38:47: Yes, pretune settings Message-ID: Archived From eenriquez at snf.stanford.edu Wed Oct 1 07:24:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Oct 2008 07:24:35 -0700 Subject: Comment lampoly SNF 2008-09-29 15:35:36: Update high reflected Message-ID: Archived From eenriquez at snf.stanford.edu Wed Oct 1 07:24:52 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Oct 2008 07:24:52 -0700 Subject: Comment lampoly SNF 2008-07-18 18:34:08: Process Qual Message-ID: Archived From rik at snf.stanford.edu Mon Oct 20 20:49:17 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Mon, 20 Oct 2008 20:49:17 -0700 Subject: Shutdown lampoly SNF 2008-10-20 20:49:17: Wafer stuck on exit arm Message-ID: Wafer got stuck on exit arm. Tried wafer clearout, but it did not work. From eenriquez at snf.stanford.edu Tue Oct 21 11:27:08 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Oct 2008 11:27:08 -0700 Subject: Shutdown lampoly SNF 2008-10-20 20:49:17: Wafer stuck on exit arm Message-ID: Vented chamber and wet cleaned. Recovered the user's wafer and placed in a wafer box marked "Maurice" , slot #1. Ran 8 wafers using recipe 1 with no problems. From eenriquez at snf.stanford.edu Tue Oct 21 11:59:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Oct 2008 11:59:31 -0700 Subject: Comment lampoly SNF 2008-10-21 11:59:30: Update bottom electrode reflected pwr Message-ID: This seems to be a problem only with the 10 second breakthrough step which calls for 45 W (generator max = 1250 W). The reflected power at this step is about 8 - 14 W. Modified recipe 1 so that the RF match is preset near the optimum tune points prior to the breakthrough step. Ran several wafers with no problem. Reflected power during the breakthough step varied from 0- 8 W. Need the process engineer to ok changes to the recipe. From mleone at snf.stanford.edu Wed Oct 22 10:04:45 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Wed, 22 Oct 2008 10:04:45 -0700 Subject: Comment lampoly SNF 2008-10-22 10:04:44: alarm on first dummy Message-ID: "alarm 208: recipe aborted. Helium clamp pressure exceeded hard tolerance." cleared. worked fine. From mleone at snf.stanford.edu Wed Oct 22 10:25:30 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Wed, 22 Oct 2008 10:25:30 -0700 Subject: Problem lampoly SNF 2008-10-22 10:25:30: shuttle arm is stuck Message-ID: shuttle arm wont home. can't run. From eenriquez at snf.stanford.edu Wed Oct 22 11:06:29 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Oct 2008 11:06:29 -0700 Subject: Problem lampoly SNF 2008-10-22 10:25:30: shuttle arm is stuck Message-ID: Re-homed the shuttle and ran 4 wafers with no problems. From mleone at snf.stanford.edu Wed Oct 22 11:51:16 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Wed, 22 Oct 2008 11:51:16 -0700 Subject: Problem lampoly SNF 2008-10-22 11:51:16: wafer lost in system Message-ID: wafer was not sensed in etch chamber, still stuck From mleone at snf.stanford.edu Wed Oct 22 12:49:43 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Wed, 22 Oct 2008 12:49:43 -0700 Subject: Shutdown lampoly SNF 2008-10-22 12:49:42: wafers stuck Message-ID: wafers stuck in system, one in etch chamber, the other in outgoing loadlock. wafer cannot be sensed in etch chamber From mtang at snf.stanford.edu Wed Oct 22 16:13:20 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 22 Oct 2008 16:13:20 -0700 Subject: Shutdown lampoly SNF 2008-10-22 12:49:42: wafers stuck Message-ID: Matt was using recipe 1, which had been changed so that there was no backside He in step 2. This is typically turned on in step 1 (He clamping.) The errors he got started with He backside, and cascaded into wafer transport problems, so there is reason to believe this was the cause. It was changed back. From eenriquez at snf.stanford.edu Wed Oct 22 16:31:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Oct 2008 16:31:24 -0700 Subject: Problem lampoly SNF 2008-10-22 11:51:16: wafer lost in system Message-ID: Lift pins did not move down. Manually moved the pins down and resumed the process. User was able to process the rest of his wafers without any problem. From mtang at snf.stanford.edu Fri Oct 24 08:15:31 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 24 Oct 2008 08:15:31 -0700 Subject: Comment lampoly SNF 2008-10-21 11:59:30: Update bottom electrode reflected pwr Message-ID: Looks much better! Thanks! From eenriquez at snf.stanford.edu Fri Oct 24 14:22:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Oct 2008 14:22:24 -0700 Subject: Comment lampoly SNF 2008-10-24 14:22:23: Maintenance activity Message-ID: Wet cleaned the chamber. Now cycle purging. User will condition the chamber. From fatihs at snf.stanford.edu Sun Oct 26 10:48:54 2008 From: fatihs at snf.stanford.edu (fatihs at snf.stanford.edu) Date: Sun, 26 Oct 2008 10:48:54 -0700 Subject: Problem lampoly SNF 2008-10-26 10:48:53: Etch problem Message-ID: The features towards the edges of the wafer are completely distorted. The center of the wafer looks OK. From mtang at snf.stanford.edu Tue Oct 28 12:39:26 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 28 Oct 2008 12:39:26 -0700 Subject: Shutdown lampoly SNF 2008-10-28 12:39:26: Wafer stuck inside Message-ID: During normal process of recipe 1 of dummy wafers, got a 313 error (gap lower limit sensed TRUE, inspect gap drive, clear alarm to override.) I cleared the alarm. then the recipe aborted right then for gap not adjusting (114). Tried running wafer clearout. Get gap drive alarms (376 - initialize test, waiting for gas to finish centering.) Again and again. Sorry, I broke it... There are two wafers inside the system, one in the chamber in an unknown state, the other in the entrance loadlock. From cbaxter at snf.stanford.edu Tue Oct 28 21:11:42 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 28 Oct 2008 21:11:42 -0700 Subject: Shutdown lampoly SNF 2008-10-28 12:39:26: Wafer stuck inside Message-ID: Recovered stuck wafers from entrance l/l and main chamber. The reason why system error is due to the gap bottom out to the lower limit switch, found a broken wire on the lower limit switch. From mtang at snf.stanford.edu Thu Oct 30 16:53:06 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 30 Oct 2008 16:53:06 -0700 Subject: Shutdown lampoly SNF 2008-10-30 16:53:05: Chuck down and gap errors Message-ID: Jesse was running when he got 047 (chamber chuck down sense fail. Sense if FALSE, should be TRUE.) I tried to run wafer cleanout and got repeated errors of 376 (the initialize tas is holding because the gap is not initialized.) With Gary's help, powered down the system and restarted. We were able to finish the cleanout. Started running test wafers on recipe 1. The fifth wafer got stuck with 047 and wafer cleanout gives repeated 376. Power down does not seem like a good idea. Are the power supply voltages OK (24V?) Also, I was trying to run a qual wafer following Fatih's profile problems (which have been confirmed on his test wafers using recipe 1 - I wanted to see if our regular monitor could detect this problem.) A couple of odd things. The He backside cooling set point is 6 torr, but is very unstable (1-20) during the clamp step (step 2) before settling in around 9-10. He also noted that the alignment of the clamp flat is a little off set from the actual flat (check the dummy wafers.) Don't know if these are indications of some clamping problem... which could affect profiles... From mtang at snf.stanford.edu Thu Oct 30 16:53:30 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 30 Oct 2008 16:53:30 -0700 Subject: Problem lampoly SNF 2008-10-30 16:53:29: Wafers inside Message-ID: By the way, there is a dummy wafer still inside the chamber... From mtang at snf.stanford.edu Thu Oct 30 18:05:20 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 30 Oct 2008 18:05:20 -0700 Subject: Comment lampoly SNF 2008-10-30 18:05:19: A couple more things... Message-ID: Thinking that it might be a good idea to check MFC cals and the chamber, I ran the 40-cycle purge and turned the electrode and chamber temperatures down to 30 C, so the LAM will be ready in the morning for some fun, should we choose... From eenriquez at snf.stanford.edu Fri Oct 31 14:44:14 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Oct 2008 14:44:14 -0700 Subject: Comment lampoly SNF 2008-10-31 14:44:13: Update Message-ID: Ran cycle purges after closing up the chamber. Leak up rate was 0.19 mT/min. Did not have time to run a gas cal.