Shutdown lampoly SNF 2008-10-20 20:49:17: Wafer stuck on exit arm

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Oct 21 11:27:08 PDT 2008


Vented chamber and wet cleaned.  Recovered the user's wafer and placed in a wafer box marked "Maurice" , slot #1.  Ran 8 wafers using recipe 1 with no problems.




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