Comment lampoly SNF 2008-10-21 11:59:30: Update bottom electrode reflected pwr

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Oct 21 11:59:31 PDT 2008


This seems to be a problem only with the 10 second breakthrough step which calls for 45 W  (generator max = 1250 W).  The reflected power at this step is about 8 - 14 W.
Modified recipe 1 so that the RF match is preset near the optimum tune points prior to the breakthrough step.   Ran several wafers with no problem.  Reflected power during the breakthough step varied from 0- 8 W.
Need the process engineer to ok changes to the recipe.




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