Shutdown lampoly SNF 2008-10-22 12:49:42: wafers stuck

mtang at snf.stanford.edu mtang at snf.stanford.edu
Wed Oct 22 16:13:20 PDT 2008


Matt was using recipe 1, which had been changed so that there was no backside He in step 2.  This is typically turned on in step 1 (He clamping.)  The errors he got started with He backside, and cascaded into wafer transport problems, so there is reason to believe this was the cause.  It was changed back. 




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