Problem lampoly SNF 2008-10-22 11:51:16: wafer lost in system

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 22 16:31:24 PDT 2008


Lift pins did not move down.  Manually moved the pins down and resumed the process.  User was able to process the rest of his wafers without any problem.




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