Shutdown lampoly SNF 2008-10-28 12:39:26: Wafer stuck inside

cbaxter at cbaxter at
Tue Oct 28 21:11:42 PDT 2008

Recovered stuck wafers from entrance l/l and main chamber.
The reason why system error is due to the gap bottom
out to the lower limit switch, found a broken wire on
the lower limit switch.

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