October 2008 Archives by subject

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Starting: Wed Oct 1 07:24:25 PDT 2008
Ending: Fri Oct 31 14:44:14 PDT 2008
Messages: 22

• Comment lampoly SNF 2008-07-18 18:34:08: Process Qual   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-09-29 15:35:36: Update high reflected   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-09-29 16:38:47: Yes, pretune settings   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-10-21 11:59:30: Update bottom electrode reflected pwr   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-10-21 11:59:30: Update bottom electrode reflected pwr   mtang at snf.stanford.edu
• Comment lampoly SNF 2008-10-22 10:04:44: alarm on first dummy   mleone at snf.stanford.edu
• Comment lampoly SNF 2008-10-24 14:22:23: Maintenance activity   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2008-10-30 18:05:19: A couple more things...   mtang at snf.stanford.edu
• Comment lampoly SNF 2008-10-31 14:44:13: Update   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-10-22 10:25:30: shuttle arm is stuck   mleone at snf.stanford.edu
• Problem lampoly SNF 2008-10-22 10:25:30: shuttle arm is stuck   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-10-22 11:51:16: wafer lost in system   mleone at snf.stanford.edu
• Problem lampoly SNF 2008-10-22 11:51:16: wafer lost in system   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2008-10-26 10:48:53: Etch problem   fatihs at snf.stanford.edu
• Problem lampoly SNF 2008-10-30 16:53:29: Wafers inside   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2008-10-20 20:49:17: Wafer stuck on exit arm   rik at snf.stanford.edu
• Shutdown lampoly SNF 2008-10-20 20:49:17: Wafer stuck on exit arm   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2008-10-22 12:49:42: wafers stuck   mleone at snf.stanford.edu
• Shutdown lampoly SNF 2008-10-22 12:49:42: wafers stuck   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2008-10-28 12:39:26: Wafer stuck inside   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2008-10-28 12:39:26: Wafer stuck inside   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2008-10-30 16:53:05: Chuck down and gap errors   mtang at snf.stanford.edu

Last message date: Fri Oct 31 14:44:14 PDT 2008
Archived on: Sun Dec 23 09:06:10 PST 2012

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