From shott at snf.stanford.edu Mon Sep 1 08:22:13 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 1 Sep 2008 08:22:13 -0700 Subject: Problem lampoly SNF 2008-08-31 13:06:17: water chiller failure Message-ID: Found upper electrode (0 deg C) liquid level low. Topped off liquid. Also, with the unit shut down, I pulled off the panels to look for the leak. It's difficult to tell condensation from an actual leak and it is even more difficult to tell behind all of the black insulation. However, we should keep an eye on this after it runs for a while to see if we can determine the source of the leak.Thanks, John From mtang at snf.stanford.edu Thu Sep 4 10:46:04 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 4 Sep 2008 10:46:04 -0700 Subject: Problem lampoly SNF 2008-07-18 18:37:05: Resist burning on wafer edge Message-ID: No more resist burning observed. Qual data looks good for September. From mtang at snf.stanford.edu Thu Sep 4 10:52:55 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 4 Sep 2008 10:52:55 -0700 Subject: Comment lampoly SNF 2008-09-04 10:52:55: Qual Sept. 08 Message-ID: Silicon etch depth (Recipe 1, 60 sec main etch) is 4683 A with 0.7% uniformity. Selectivity to resist 4.1. Expected values are 4300 A with <5% uniformity and selectivity of 3.5-4.5. Qual is good. From panjun at snf.stanford.edu Fri Sep 5 17:23:46 2008 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Fri, 5 Sep 2008 17:23:46 -0700 Subject: Problem lampoly SNF 2008-09-05 17:23:46: water chiller has failed Message-ID: From mtang at snf.stanford.edu Sat Sep 6 10:14:20 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 6 Sep 2008 10:14:20 -0700 Subject: Shutdown lampoly SNF 2008-09-06 10:14:20: Compressor failure Message-ID: The following comment from John, following yesterday's excitement with chilled water and CDA failures: "the compressor on the Lampoly .... seems to have died and may have been fried by the lack of cooling water." From eenriquez at snf.stanford.edu Mon Sep 8 14:36:42 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Sep 2008 14:36:42 -0700 Subject: Shutdown lampoly SNF 2008-09-06 10:14:20: Compressor failure Message-ID: Reset the compressor. Ran 2 wafers (recipe 90) with no problems. From eenriquez at snf.stanford.edu Mon Sep 8 14:37:00 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Sep 2008 14:37:00 -0700 Subject: Problem lampoly SNF 2008-09-05 17:23:46: water chiller has failed Message-ID: Reset the chiller compressor. From tura at snf.stanford.edu Tue Sep 9 12:11:24 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 9 Sep 2008 12:11:24 -0700 Subject: Problem lampoly SNF 2008-09-09 12:11:22: "water chiller has failed{" Message-ID: the error is back From eenriquez at snf.stanford.edu Tue Sep 9 14:50:09 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Sep 2008 14:50:09 -0700 Subject: Shutdown lampoly SNF 2008-09-09 14:50:09: Chiller is off Message-ID: Chiller's circuit breaker keeps tripping. From shott at stanford.edu Tue Sep 9 14:56:27 2008 From: shott at stanford.edu (John Shott) Date: Tue, 09 Sep 2008 14:56:27 -0700 Subject: Shutdown lampoly SNF 2008-09-09 14:50:09: Chiller is off In-Reply-To: <20080909215010.3D5AF65AF99@smtp2.stanford.edu> References: <20080909215010.3D5AF65AF99@smtp2.stanford.edu> Message-ID: <48C6F10B.9020608@stanford.edu> Elmer: While this may not be related .... and you got further than I did because I couldn't get the upper compressor light to go out .... I think that the oversized muffin fan that blows air on the upper compressor may have failed. Is it possible that this is causing some sort of overtemp or overcurrrent condition? It's a bigger muffin fan than we normally use .... more like 6" in diameter and maybe 2" deep, but I've had pretty good success getting these type of things from Jameco. Is that worth exploring? Thanks, John From eenriquez at snf.stanford.edu Wed Sep 10 18:42:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Sep 2008 18:42:41 -0700 Subject: Comment lampoly SNF 2008-09-10 18:42:40: Update Message-ID: The chiller consist of two separate chillers. The upper chiller has a defective pump which causes a flow fault. The lower chiller has a defective compressor which causes the circuit breaker to trip. We will replace the chiller on Friday if we are unable to repair the defective components. From eenriquez at snf.stanford.edu Fri Sep 12 15:12:48 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Sep 2008 15:12:48 -0700 Subject: Comment lampoly SNF 2008-09-12 15:12:46: Update Message-ID: Replaced the chiller. New chiller is running too cold (setpoint = 66 C, actual = -2 C ). Need to troubleshoot From news at discount-educational-software.net Sat Sep 13 02:09:56 2008 From: news at discount-educational-software.net (Educational Software Newsletter) Date: Sat, 13 Sep 2008 05:09:56 -0400 Subject: Educational Software News - September 2008 Message-ID: <8799f82836f721923e7167ac7fd684@bmw> Back-to-School promotional price for Microsoft Office 2007 Professional available while supplies last! See details below. Adobe Acrobat Professional 9.0 has just been released along with updated versions of the Adobe Creative Suite bundles. See below for more details. Computer Products for Education is pleased to provide Educational Software News to current students, faculty, staff, and schools with news, pricing, and availability of Academic Edition Software from Microsoft, Adobe, Corel, Autodesk, Quark, EndNote, FileMaker, and many other major software manufacturers. 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However, if you do not wish to receive any more newsletters from CPE, please use the following link: http://www.discount-educational-software.us/rem.asp?a=remv&e=lampoly-pcs at snf.stanford.edu Or call 800-679-7007 for additional options. __________________________ Sincerely, Computer Products for Education 5325 140th Avenue North Clearwater, Florida 33760 Tel: 800-679-7007 Fax: 800-679-6996 support at discount-educational-software.us ___________________ THANK YOU!!! From shott at snf.stanford.edu Sun Sep 14 19:58:29 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 14 Sep 2008 19:58:29 -0700 Subject: Problem lampoly SNF 2008-09-09 12:11:22: "water chiller has failed{" Message-ID: Elmer replaced the M&W chiller with a spare unit. While it has taken a while, the resistivity is finally above 1.0 MOhm-cm. We should likely purchase some hi-temp DI cartridges from Spectra Cure (theirs are rated to 70C whereas most are only rated to 40C). From shott at snf.stanford.edu Sun Sep 14 19:58:42 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 14 Sep 2008 19:58:42 -0700 Subject: Shutdown lampoly SNF 2008-09-09 14:50:09: Chiller is off Message-ID: Elmer replaced the M&W chiller with a spare unit. While it has taken a while, the resistivity is finally above 1.0 MOhm-cm. We should likely purchase some hi-temp DI cartridges from Spectra Cure (theirs are rated to 70C whereas most are only rated to 40C). From shott at snf.stanford.edu Sun Sep 14 19:58:51 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 14 Sep 2008 19:58:51 -0700 Subject: Comment lampoly SNF 2008-09-10 18:42:40: Update Message-ID: Elmer replaced the M&W chiller with a spare unit. While it has taken a while, the resistivity is finally above 1.0 MOhm-cm. We should likely purchase some hi-temp DI cartridges from Spectra Cure (theirs are rated to 70C whereas most are only rated to 40C). From shott at snf.stanford.edu Sun Sep 14 19:59:00 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 14 Sep 2008 19:59:00 -0700 Subject: Comment lampoly SNF 2008-09-12 15:12:46: Update Message-ID: Elmer replaced the M&W chiller with a spare unit. While it has taken a while, the resistivity is finally above 1.0 MOhm-cm. We should likely purchase some hi-temp DI cartridges from Spectra Cure (theirs are rated to 70C whereas most are only rated to 40C). From eenriquez at snf.stanford.edu Mon Sep 15 08:33:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Sep 2008 08:33:21 -0700 Subject: Comment lampoly SNF 2008-09-15 08:33:20: Update Message-ID: Ran 4 wafers using recipe 90 with no problems. From panjun at snf.stanford.edu Wed Sep 24 20:59:08 2008 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Wed, 24 Sep 2008 20:59:08 -0700 Subject: Problem lampoly SNF 2008-09-24 20:59:08: alarm 80 Message-ID: process aborted due to alarm 80 when running warm-up procedure From maryamzm at snf.stanford.edu Thu Sep 25 02:15:00 2008 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Thu, 25 Sep 2008 02:15:00 -0700 Subject: Shutdown lampoly SNF 2008-09-25 02:14:59: Wafer stuck inside chamber Message-ID: The exit arm failed to sense the exit cassett...so it took the wafer back into the loadlock. It then tried to unload a wafer from the chamber. So right now there are two wafers in the chamber....one on the arm and one (hopefully) on the chuck. From eenriquez at snf.stanford.edu Thu Sep 25 14:47:48 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 25 Sep 2008 14:47:48 -0700 Subject: Shutdown lampoly SNF 2008-09-25 02:14:59: Wafer stuck inside chamber Message-ID: Recovered user's wafers. One wafer broke in the chamber and another one cracked. Wiped down the chamber and ran the clean recipe (90) with no problems. From eenriquez at snf.stanford.edu Thu Sep 25 14:48:10 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 25 Sep 2008 14:48:10 -0700 Subject: Comment lampoly SNF 2008-09-15 08:33:20: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Sep 25 14:49:00 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 25 Sep 2008 14:49:00 -0700 Subject: Shutdown lampoly SNF 2008-09-25 14:49:00: Needs a qual Message-ID: Need to run a qual after the chamber was opened. From mtang at snf.stanford.edu Thu Sep 25 20:08:04 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 25 Sep 2008 20:08:04 -0700 Subject: Shutdown lampoly SNF 2008-09-25 14:49:00: Needs a qual Message-ID: Be aware, qual has not been done yet. From mtang at snf.stanford.edu Thu Sep 25 20:09:08 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 25 Sep 2008 20:09:08 -0700 Subject: Problem lampoly SNF 2008-09-25 20:09:08: Qual not done yet Message-ID: Be advised, process qual is not yet done. From mtang at snf.stanford.edu Fri Sep 26 13:22:55 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 26 Sep 2008 13:22:55 -0700 Subject: Problem lampoly SNF 2008-09-25 20:09:08: Qual not done yet Message-ID: Qual done. Etch results using recipe 1: - Etch Depth = 4020 A - Etch uniformity = 2.0% - Resist selectivity = 3.71 Result is good, however, tune time was longer than desired and error 80 was enountered a few times. From mtang at snf.stanford.edu Fri Sep 26 13:27:10 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 26 Sep 2008 13:27:10 -0700 Subject: Problem lampoly SNF 2008-09-26 13:27:09: RF tuning? Message-ID: The RF seems to take longer to tune than usual, maybe up to 5 seconds in the main etch. For the short breakthrough etch, it can be unstable, leading to error 80 (pressure out of tolerance.) Actually, the pressure is good, but then bounces around as soon as RF comes on and continues to bounce with reflecticted power. Both upper and lower reflected powers can be unstable or higher than usual, but this is intermittent. By the way, I also saw an incident of error 81 (RF out of tolerance.) For non-critical etches, this is OK to use. The recipe may halt or abort if error 80 or 81 appear, so be careful. Will follow up with one of the experts for more advice. From mtang at snf.stanford.edu Fri Sep 26 16:46:28 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 26 Sep 2008 16:46:28 -0700 Subject: Shutdown lampoly SNF 2008-09-26 16:46:27: High Reflected Power in C2F6 Message-ID: System has very high reflected power on recipe 1 and other recipes using C2F6 breakthrough. Tuning also seem to take longer than usual in the main etch, although it does tune well. From eenriquez at snf.stanford.edu Mon Sep 29 15:35:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 29 Sep 2008 15:35:37 -0700 Subject: Comment lampoly SNF 2008-09-29 15:35:36: Update high reflected Message-ID: RF tuning works better when set at the correct pretune settings. At the current setting, reflected power~ 150 W when plasma first strikes (recipe 1, step 3). When the pretune is set closer to the "learned" tuning value, the starting reflected power ~ 70 W. Ran 8 wafers with no problems. Need to optimize the pretunes of the problem recipes. From mtang at snf.stanford.edu Mon Sep 29 16:38:48 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 29 Sep 2008 16:38:48 -0700 Subject: Comment lampoly SNF 2008-09-29 16:38:47: Yes, pretune settings Message-ID: I'm playing around with recipe 1 (saved as 101). Set the delays on RF tuning to 1 second and RF pretune values as Elmer suggests. Get uncontrolled pressure on C2F2 breakthrough step, so set up VAT delays and pretune as well. Pressure used to spike up above 100 mt during step3 when RF came on - now it spikes up to about 60 mt. Despite pretuning, reflected power on the lower electrode is still higher than desired (about 8-12 W reflected for 45 W forward.) So, will play around some more with tune settings tomorrow. Also adjusted the process pressure baratron. It was reading minus 0.4-0.5 mt, so adjusted it to read zero. I know, not good practice without a confirming gage, but I thought zero had to be better than less than zero. Once we figure out recipe 1, we'll work on other recipes. From mtang at snf.stanford.edu Tue Sep 30 15:15:37 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 30 Sep 2008 15:15:37 -0700 Subject: Shutdown lampoly SNF 2008-09-26 16:46:27: High Reflected Power in C2F6 Message-ID: We followed the recommended procedures and set tolerance and presets for the commonly used programs: #1, 2, 25, 77, 90, 91, 93, and 99. If you use a program other than one of these, let me know and we can set tolerances and presets. The reflected power on the lower electrode still tends to be high when forward power setting is below 50 W. We need to investigate further. However, the qual is good and the system is usable. See comments for tolerances and presets. From mtang at snf.stanford.edu Tue Sep 30 15:26:11 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 30 Sep 2008 15:26:11 -0700 Subject: Problem lampoly SNF 2008-09-26 13:27:09: RF tuning? Message-ID: Largely addressed by setting pretune settings properly. All adjusted recipes seem to be OK (#1, 2, 25, 77, 90, 91, 93, 99.) #25 takes longer than normal to tune (about 15 sec) on the main etch, so this needs to be looked at. Lower electrode reflected power is still higher than desirable when power setting is below 50 W. This also needs to be looked at. Recipe soft ahd hard tolerances were set as follows: Pressure: 10%/10% for stablization steps, 10%/20% for RF RF Top: 10%/20% RF Bottom: 20%/50% (until tuning at low power is addressed) He clamp: 10%/20% Otherwise, all other soft and hard recipe tolerances are set at 10%/10%. Presets are generally as follows: Default (no RF) RF Top On delay = 0 Top Match = Auto Top Preset hold = 0 Top Tune Preset = 15000 Top Load preset = 15000 Bot RF On delay = 0 Bot Match mode = Auto Bot Preset Hold = 0 Bot Tune preset = 10000 Bot Load preset = 10000 (These are Lam defaults, left this way in case recipe steps are copied.) For Stabilitzation and RF On steps, VAT preset were set based on actual values. Delay was typically 1 second, except for recipes where radically different gas flows were used between steps. For RF steps, the Preset Hold was typically 1 sec., except where tuning was particularly difficult and preset hold was increased. Preset tune and load values were based on actual values when the process was tuned. From mtang at snf.stanford.edu Tue Sep 30 15:26:52 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 30 Sep 2008 15:26:52 -0700 Subject: Problem lampoly SNF 2008-09-24 20:59:08: alarm 80 Message-ID: This is a pressure alarm due to RF tuning problems. This has been largely addressed by properly setting pretune values. From mtang at snf.stanford.edu Tue Sep 30 15:27:51 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 30 Sep 2008 15:27:51 -0700 Subject: Problem lampoly SNF 2008-09-30 15:27:51: Bottom electrode reflected power Message-ID: The bottom electrode has higher than desirable reflected power when the power setting is 50 W or below. The system is usable and the qual is good, but this needs to be looked into.