From yeh at snf.stanford.edu Mon Apr 6 11:12:10 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 6 Apr 2009 11:12:10 -0700 Subject: Comment lampoly SNF 2009-04-06 11:12:09: one cassette missing Message-ID: only one cassette is available. borrowed another one from litho. From sbasumal at snf.stanford.edu Mon Apr 6 16:24:19 2009 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Mon, 6 Apr 2009 16:24:19 -0700 Subject: Comment lampoly SNF 2009-04-06 16:24:18: found cassette in litho area Message-ID: From bchui at snf.stanford.edu Mon Apr 13 01:06:14 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 13 Apr 2009 01:06:14 -0700 Subject: Problem lampoly SNF 2009-04-13 01:06:14: Warning 340: internal timer will time out in 72 hours Message-ID: Machine needs to be restarted, warning says. From cbaxter at snf.stanford.edu Mon Apr 13 19:33:09 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 13 Apr 2009 19:33:09 -0700 Subject: Problem lampoly SNF 2009-04-13 01:06:14: Warning 340: internal timer will time out in 72 hours Message-ID: Tool has been reset... From mtang at snf.stanford.edu Thu Apr 16 16:51:35 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 16 Apr 2009 16:51:35 -0700 Subject: Shutdown lampoly SNF 2009-04-16 16:51:35: No HBr Message-ID: TGO alarm in the cabinet. Shutting down the gas. From mtang at snf.stanford.edu Fri Apr 17 16:18:35 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 17 Apr 2009 16:18:35 -0700 Subject: Shutdown lampoly SNF 2009-04-16 16:51:35: No HBr Message-ID: The HBr problem we suspect might be cross-sensitivity of the TGO sensor with some environmental conditions. It was quiet overnight and much less noisy today. HBr has been turned back on. But please watch your HBr flows when you process critical material. (If the sensor goes off in the vault, there will be no audible alarm in the lab, but the HBr will shut off.) From mtang at snf.stanford.edu Fri Apr 17 16:18:57 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 17 Apr 2009 16:18:57 -0700 Subject: Problem lampoly SNF 2009-04-17 16:18:56: HBr Message-ID: The HBr problem from yesterday we suspect might be cross-sensitivity of the TGO sensor with some environmental conditions. It was quiet overnight and much less noisy today. HBr has been turned back on. But please watch your HBr flows when you process critical material. (If the sensor goes off in the vault, there will be no audible alarm in the lab, but the HBr will shut off.) From eenriquez at snf.stanford.edu Fri Apr 24 09:04:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Apr 2009 09:04:23 -0700 Subject: Comment lampoly SNF 2009-04-24 09:04:23: Gas#8 changed from Ar to N2 Message-ID: Completed re-plumbing of N2 gas line. Verified system configuration. Gas #8 MFC is calibrated to N2 with a maximum flow of 50 sccm. Still need to perform a gas calibration at 30 C. From wessmith at snf.stanford.edu Wed Apr 29 18:53:23 2009 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Wed, 29 Apr 2009 18:53:23 -0700 Subject: Shutdown lampoly SNF 2009-04-29 18:53:23: Wafer stuck/broken in etch chamber Message-ID: Robot arm moved into chamber to retrieve wafer but did not come out with the wafer. Alarm states that output cassette does not recognize wafer. From cbaxter at snf.stanford.edu Wed Apr 29 19:08:06 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 29 Apr 2009 19:08:06 -0700 Subject: Shutdown lampoly SNF 2009-04-29 18:53:23: Wafer stuck/broken in etch chamber Message-ID: Recovered wafer from chamber, wafer was not broken.