Shutdown lampoly SNF 2009-04-29 18:53:23: Wafer stuck/broken in etch chamber

wessmith at snf.stanford.edu wessmith at snf.stanford.edu
Wed Apr 29 18:53:23 PDT 2009


Robot arm moved into chamber to retrieve wafer but did not come out with the wafer. Alarm states that output cassette does not recognize wafer.




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