From mtang at snf.stanford.edu Mon Aug 3 12:52:52 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 3 Aug 2009 12:52:52 -0700 Subject: Shutdown lampoly SNF 2009-07-31 21:06:42: Exit load luck outer door did not close. Message-ID: Am not sure why, but the problem seems to have cleared itself. In addition to this error, a few hours later after the system was shutdown, errors 015 and 001 appeared (loadlock purge errors.) Ran wafers and no loadlock errors appeared. However, the He backside purge seems to take a long time to stabilize (about 9 wafers.) We hope to have someone in on Wednesday to take a look at this. From iwjung at snf.stanford.edu Thu Aug 6 17:00:18 2009 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Thu, 6 Aug 2009 17:00:18 -0700 Subject: Shutdown lampoly SNF 2009-08-06 17:00:18: He clamp press error Message-ID: Error 209. He clamp press exceeded soft tolerance. Recipe was holding in step 2. Aborted recipe. 3 Dummy wafers stranded on track and chamber. Can't find something in menu to clear wafers or skip step. From cbaxter at snf.stanford.edu Thu Aug 6 17:48:22 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 6 Aug 2009 17:48:22 -0700 Subject: Shutdown lampoly SNF 2009-08-06 17:00:18: He clamp press error Message-ID: Aborted the wafer o main chamber and continue running the rest of the dummy wafers w/out problem. backside he is 6.3sccm From iwjung at snf.stanford.edu Thu Aug 6 22:20:12 2009 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Thu, 6 Aug 2009 22:20:12 -0700 Subject: Shutdown lampoly SNF 2009-08-06 22:20:11: same problem again Message-ID: Error 209: Recipe holding in stability step. He clamp press exceeded soft tolerance. Wafers stuck in etch chamber. From eenriquez at snf.stanford.edu Fri Aug 7 08:50:51 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Aug 2009 08:50:51 -0700 Subject: Shutdown lampoly SNF 2009-08-06 22:20:11: same problem again Message-ID: Cleared error and resumed process. Completed the rest of the wafers (10 ??) with no problems. The backside cooling He flow takes several wafers before it stabilizes. If the problem re-occurs, just clear the error and resume From filip at snf.stanford.edu Tue Aug 11 17:35:50 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Tue, 11 Aug 2009 17:35:50 -0700 Subject: Problem lampoly SNF 2009-08-11 17:35:50: He tolerances Message-ID: step 2 fails soft tolerance repeatedly step 5 fails hard tolerance repeatedly. Not recommended for use. From mtang at snf.stanford.edu Wed Aug 12 16:47:55 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 12 Aug 2009 16:47:55 -0700 Subject: Problem lampoly SNF 2009-06-24 15:37:39: Update Message-ID: Helium clamp pressure instability has been fixed! From mtang at snf.stanford.edu Wed Aug 12 16:48:16 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 12 Aug 2009 16:48:16 -0700 Subject: Problem lampoly SNF 2009-07-03 09:32:28: Exit load lock robot arm stuck Message-ID: Repaired, as per clamp replacement and gap cal, 7/22. From mtang at snf.stanford.edu Wed Aug 12 16:49:37 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 12 Aug 2009 16:49:37 -0700 Subject: Problem lampoly SNF 2009-08-11 17:35:50: He tolerances Message-ID: Jay Morford from Berkeley made adjustments to the He pressure regulator. He flow controls very nicely now, but further adjustment may be needed. Please report any He backside pressure issues. From nharjee at snf.stanford.edu Thu Aug 13 11:12:35 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Thu, 13 Aug 2009 11:12:35 -0700 Subject: Problem lampoly SNF 2009-08-13 11:12:35: Cassette hitting unload robot arm Message-ID: On unload of the wafer, the cassette hits the robot arm as it indexes up. Looking at the arm when it is idle, it appears to be off center, which is likely causing the problem. From mtang at snf.stanford.edu Thu Aug 13 14:49:03 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 13 Aug 2009 14:49:03 -0700 Subject: Comment lampoly SNF 2009-07-27 10:00:37: Backside He Message-ID: Fixed, 8/12/09 From mtang at snf.stanford.edu Thu Aug 13 14:49:37 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 13 Aug 2009 14:49:37 -0700 Subject: Comment lampoly SNF 2009-08-13 14:49:36: He backside cooling repaired Message-ID: Jay Morford from Berkeley made adjustments to the He pressure regulator. He flow controls very nicely now, but further adjustment may be needed. Please report any He backside pressure issues. From mzhang2 at snf.stanford.edu Thu Aug 13 15:49:21 2009 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Thu, 13 Aug 2009 15:49:21 -0700 Subject: Shutdown lampoly SNF 2009-08-13 15:49:21: holder stuck Message-ID: the holder got stuck in the cassette on the sending side. From cbaxter at snf.stanford.edu Thu Aug 13 19:28:19 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Aug 2009 19:28:19 -0700 Subject: Shutdown lampoly SNF 2009-08-13 15:49:21: holder stuck Message-ID: Homed load arm and adjusted, load arm at elevator sensor. From jprovine at snf.stanford.edu Sat Aug 15 08:25:49 2009 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 15 Aug 2009 08:25:49 -0700 Subject: Problem lampoly SNF 2009-08-15 08:25:49: extractor arm stuck exiting etch chamber Message-ID: the robot arm became stuck exiting the etch chamber with the first dummy wafer during use. only dummy wafers in system. gap measurement seems fine. we were running recipe 1. From tura at snf.stanford.edu Mon Aug 17 12:05:00 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Mon, 17 Aug 2009 12:05:00 -0700 Subject: Shutdown lampoly SNF 2009-08-17 12:04:59: wafers are still stuck Message-ID: From cbaxter at snf.stanford.edu Tue Aug 18 02:18:07 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 18 Aug 2009 02:18:07 -0700 Subject: Shutdown lampoly SNF 2009-08-17 12:04:59: wafers are still stuck Message-ID: Recovered system and removed stuck wafers on system. From makotom1 at snf.stanford.edu Tue Aug 18 20:09:26 2009 From: makotom1 at snf.stanford.edu (makotom1 at snf.stanford.edu) Date: Tue, 18 Aug 2009 20:09:26 -0700 Subject: Problem lampoly SNF 2009-08-18 20:09:25: wafer was not loaded Message-ID: when the recipe starts, arm could not take the wafer from load cassette. 376 error ("The initialize task is waiting for the gap...") reported, but I cannnot recover this state. How can I recover the state? From bchui at snf.stanford.edu Tue Aug 18 21:07:57 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 18 Aug 2009 21:07:57 -0700 Subject: Shutdown lampoly SNF 2009-08-18 21:07:56: Init error: waiting for gap to finish centering Message-ID: couldn't get it to start From mtang at snf.stanford.edu Thu Aug 20 17:57:47 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 20 Aug 2009 17:57:47 -0700 Subject: Problem lampoly SNF 2009-08-20 17:57:47: lampoly gap initialization error Message-ID: The 376 gap initialization error pops up. This is a common error that happens when the machine initializes and generally clears itself. However, it's not clearing. The gap stays at the initialization value of 8.37 cm. I tried putting the system in manual driving the gap -- no go. I also lowered the gap initialization value on the configuration page, thinking that it would initialize, but no response. Is it the gap drive mechanism? We've also had some different wafer handling errors that we have not seen before -- is it possible one of the power supplies is dropping out? From cbaxter at snf.stanford.edu Fri Aug 21 03:30:00 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 21 Aug 2009 03:30:00 -0700 Subject: Shutdown lampoly SNF 2009-08-18 21:07:56: Init error: waiting for gap to finish centering Message-ID: The upper limit safety flag sensor broke off, got it to snapped together, will need to be replace for now is working fine. Checked gas positions and there ok. From cbaxter at snf.stanford.edu Fri Aug 21 03:30:22 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 21 Aug 2009 03:30:22 -0700 Subject: Problem lampoly SNF 2009-08-18 20:09:25: wafer was not loaded Message-ID: From cbaxter at snf.stanford.edu Fri Aug 21 03:30:33 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 21 Aug 2009 03:30:33 -0700 Subject: Problem lampoly SNF 2009-08-15 08:25:49: extractor arm stuck exiting etch chamber Message-ID: From cbaxter at snf.stanford.edu Fri Aug 21 03:30:40 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 21 Aug 2009 03:30:40 -0700 Subject: Problem lampoly SNF 2009-08-20 17:57:47: lampoly gap initialization error Message-ID: From cbaxter at snf.stanford.edu Fri Aug 21 03:30:45 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 21 Aug 2009 03:30:45 -0700 Subject: Problem lampoly SNF 2009-08-13 11:12:35: Cassette hitting unload robot arm Message-ID: From makotom1 at snf.stanford.edu Fri Aug 21 13:19:33 2009 From: makotom1 at snf.stanford.edu (makotom1 at snf.stanford.edu) Date: Fri, 21 Aug 2009 13:19:33 -0700 Subject: Problem lampoly SNF 2009-08-21 13:19:32: alerm 68,79; dummy wafer doesn't go to chamber Message-ID: alterm 68, 79 appeared. Gap spacing seems to be not good... Dummy wafer is staying on the arm. From gth at snf.stanford.edu Fri Aug 21 13:45:17 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 21 Aug 2009 13:45:17 -0700 Subject: Shutdown lampoly SNF 2009-08-21 13:45:17: Gap spacing seems to be not good Message-ID: alterm 68, 79 appeared. Gap spacing seems to be not good... Dummy wafer is staying on the arm. From mtang at snf.stanford.edu Fri Aug 21 14:29:43 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 21 Aug 2009 14:29:43 -0700 Subject: Shutdown lampoly SNF 2009-08-21 13:45:17: Gap spacing seems to be not good Message-ID: The LED sensor was out of alignment and split. The flag bumped into it. With Gaurav's help, realigned the LED and bent the metal flag slightly so it would fit inside the LED. Ran the gap up and down several times and it looks OK. From mtang at snf.stanford.edu Fri Aug 21 14:30:07 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 21 Aug 2009 14:30:07 -0700 Subject: Problem lampoly SNF 2009-08-21 13:19:32: alerm 68,79; dummy wafer doesn't go to chamber Message-ID: Reattached the sensor and aligned the flag. From mtang at snf.stanford.edu Fri Aug 21 14:33:34 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 21 Aug 2009 14:33:34 -0700 Subject: Problem lampoly SNF 2009-08-21 14:33:34: Watch the turbo please Message-ID: Just a reminder to watch the turbo pump which seems to get bogged down after a lot of process gas flowing. The controller is the Pfeiffer TCP 600. Top speed is 600. With long etches, it may drop. It will fault below about 570. When it starts to drop to 580 or below, let the machine idle without process gas until the turbo recovers. Then you can proceed. Spare pump(s) are being located. From bchui at snf.stanford.edu Sun Aug 23 22:27:47 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Aug 2009 22:27:47 -0700 Subject: Problem lampoly SNF 2009-08-23 22:27:46: Output cassette drive misalign Message-ID: Output cassette drive doesn't align with the output arm. The wafer 'trips' when it's being returned to the output cassette (the cassette rises before the output arm has a chance to let go of the wafer). In fact, the sixth wafer out skips a slot, i.e. the cassette is probably rising too fast/too much. From cbaxter at snf.stanford.edu Wed Aug 26 18:16:43 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 26 Aug 2009 18:16:43 -0700 Subject: Problem lampoly SNF 2009-08-23 22:27:46: Output cassette drive misalign Message-ID: From gth at snf.stanford.edu Thu Aug 27 23:25:18 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 27 Aug 2009 23:25:18 -0700 Subject: Problem lampoly SNF 2009-08-27 23:25:17: pump problem. Message-ID: the pump goes from 600 to 505, is that a problem, its situation worsens as we have so many dummies to run ! Mary mentioned that the pump would trip if it goes below 580, it does notrip ! From eenriquez at snf.stanford.edu Fri Aug 28 14:46:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Aug 2009 14:46:34 -0700 Subject: Comment lampoly SNF 2009-08-28 14:46:33: Update pump problems Message-ID: Will replace the turbo backing pump on Thursday 9/3 From gth at snf.stanford.edu Fri Aug 28 18:05:22 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 28 Aug 2009 18:05:22 -0700 Subject: Comment lampoly SNF 2009-08-28 18:05:21: new dummies Message-ID: Trashed old dummies.